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TJ ET EMC /P <</MCID 12 >> BDC BT 1 0 0 -1 319.98400879 20.62100029 Tm [(Residue)] TJ ET EMC /P <</MCID 13 >> BDC BT 1 0 0 -1 367.43200684 20.62100029 Tm [( )] TJ ET EMC /P <</MCID 14 >> BDC BT 1 0 0 -1 370.93200684 20.62100029 Tm [(Removal)] TJ ET EMC /P <</MCID 15 >> BDC BT 1 0 0 -1 423.80801392 20.62100029 Tm [( )] TJ ET EMC /P <</MCID 16 >> BDC BT 1 0 0 -1 427.30801392 20.62100029 Tm [(Technology)] TJ ET EMC /P <</MCID 17 >> BDC BT 1 0 0 -1 496.53601074 20.62100029 Tm /GS1 gs 0 g [( )] TJ ET EMC q 1 0 0 1 0 31.20000076 cm /P <</MCID 18 >> BDC BT /FAAABB 8 Tf 1 0 0 -1 33.78099823 8.46700001 Tm /GS2 gs 0 g [<0003>] TJ ET EMC /P <</MCID 19 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 38.61299896 12.10299969 Tm [(Ting)] TJ ET EMC /P <</MCID 20 >> BDC BT 1 0 0 -1 61.27700043 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 21 >> BDC BT 1 0 0 -1 64.27700043 12.10299969 Tm [(Yao)] TJ ET EMC /P <</MCID 22 >> BDC BT 1 0 0 -1 84.26899719 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 23 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 87.26899719 8.46700001 Tm [(1)] TJ ET EMC /P <</MCID 24 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 91.26899719 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 25 >> BDC BT 1 0 0 -1 94.26899719 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 26 >> BDC BT 1 0 0 -1 97.26899719 12.10299969 Tm [(Yang)] TJ ET EMC /P <</MCID 27 >> BDC BT 1 0 0 -1 123.26100159 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 28 >> BDC BT 1 0 0 -1 126.26100159 12.10299969 Tm [(Chen)] TJ ET EMC /P <</MCID 29 >> BDC BT 1 0 0 -1 151.59100342 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 30 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 154.59100342 8.46700001 Tm [(1)] TJ ET EMC /P <</MCID 31 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 158.59100342 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 32 >> BDC BT 1 0 0 -1 161.59100342 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 33 >> BDC BT 1 0 0 -1 164.59100342 12.10299969 Tm [(Wenjun)] TJ ET EMC /P <</MCID 34 >> BDC BT 1 0 0 -1 202.57699585 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 35 >> BDC BT 1 0 0 -1 205.57699585 12.10299969 Tm [(Wang)] TJ ET EMC /P <</MCID 36 >> BDC BT 1 0 0 -1 234.22900391 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 37 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 237.22900391 8.46700001 Tm [(1)] TJ ET EMC /P <</MCID 38 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 241.22900391 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 39 >> BDC BT 1 0 0 -1 244.22900391 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 40 >> BDC BT 1 0 0 -1 247.22900391 12.10299969 Tm [(Xiaoyan)] TJ ET EMC /P <</MCID 41 >> BDC BT 1 0 0 -1 287.88101196 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 42 >> BDC BT 1 0 0 -1 290.88101196 12.10299969 Tm [(Zhang)] TJ ET EMC /P <</MCID 43 >> BDC BT 1 0 0 -1 321.5369873 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 44 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 324.5369873 8.46700001 Tm [(1)] TJ ET EMC /P <</MCID 45 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 328.5369873 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 46 >> BDC BT 1 0 0 -1 331.5369873 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 47 >> BDC BT 1 0 0 -1 334.5369873 12.10299969 Tm [(Fuping)] TJ ET EMC /P <</MCID 48 >> BDC BT 1 0 0 -1 368.54501343 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 49 >> BDC BT 1 0 0 -1 371.54501343 12.10299969 Tm [(Chen)] TJ ET EMC /P <</MCID 50 >> BDC BT 1 0 0 -1 396.875 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 51 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 399.875 8.46700001 Tm [(1)] TJ ET EMC /P <</MCID 52 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 403.875 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 53 >> BDC BT 1 0 0 -1 406.875 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 54 >> BDC BT 1 0 0 -1 409.875 12.10299969 Tm [(David)] TJ ET EMC /P <</MCID 55 >> BDC BT 1 0 0 -1 439.20098877 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 56 >> BDC BT 1 0 0 -1 442.20098877 12.10299969 Tm [(H.)] TJ ET EMC /P <</MCID 57 >> BDC BT 1 0 0 -1 453.86700439 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 58 >> BDC BT 1 0 0 -1 456.86700439 12.10299969 Tm [(Wang)] TJ ET EMC /P <</MCID 59 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 485.51901245 8.46700001 Tm [(1)] TJ ET EMC /P <</MCID 60 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 489.51901245 12.10299969 Tm /GS3 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 46.79999924 cm /P <</MCID 61 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 127.33100128 12.10299969 Tm /GS4 gs 0 g [(Dongqiang)] TJ ET EMC /P <</MCID 62 >> BDC BT 1 0 0 -1 180.65699768 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 63 >> BDC BT 1 0 0 -1 183.65699768 12.10299969 Tm [(Chen)] TJ ET EMC /P <</MCID 64 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 208.98699951 8.46700001 Tm [(2)] TJ ET EMC /P <</MCID 65 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 212.98699951 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 66 >> BDC BT 1 0 0 -1 215.98699951 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 67 >> BDC BT 1 0 0 -1 218.98699951 12.10299969 Tm [(Sunny)] TJ ET EMC /P <</MCID 68 >> BDC BT 1 0 0 -1 249.66099548 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 69 >> BDC BT 1 0 0 -1 252.66099548 12.10299969 Tm [(He)] TJ ET EMC /P <</MCID 70 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 266.65301514 8.46700001 Tm [(2)] TJ ET EMC /P <</MCID 71 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 270.65301514 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 72 >> BDC BT 1 0 0 -1 273.65301514 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 73 >> BDC BT 1 0 0 -1 276.65301514 12.10299969 Tm [(Rock)] TJ ET EMC /P <</MCID 74 >> BDC BT 1 0 0 -1 301.98300171 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 75 >> BDC BT 1 0 0 -1 304.98300171 12.10299969 Tm [(Xu)] TJ ET EMC /P <</MCID 76 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 319.64898682 8.46700001 Tm [(2)] TJ ET EMC /P <</MCID 77 >> BDC BT /FAAABG 12 Tf 1 0 0 -1 323.64898682 12.10299969 Tm [(,)] TJ ET EMC /P <</MCID 78 >> BDC BT 1 0 0 -1 326.64898682 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 79 >> BDC BT 1 0 0 -1 329.64898682 12.10299969 Tm [(Libbert)] TJ ET EMC /P <</MCID 80 >> BDC BT 1 0 0 -1 364.96899414 12.10299969 Tm [( )] TJ ET EMC /P <</MCID 81 >> BDC BT 1 0 0 -1 367.96899414 12.10299969 Tm [(Peng)] TJ ET EMC /P <</MCID 82 >> BDC BT /FAAABG 8 Tf 1 0 0 -1 391.96899414 8.46700001 Tm [(2)] TJ ET EMC /P <</MCID 83 >> BDC BT /FAAACB 12 Tf 1 0 0 -1 395.96899414 12.10299969 Tm /GS5 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 62.40000153 cm /P <</MCID 84 >> BDC BT /FAAACB 12 Tf 1 0 0 -1 261.6499939 11.90100002 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 78 cm /P <</MCID 85 >> BDC BT /FAAABG 6.5 Tf 1 0 0 -1 141.59199524 8.35599995 Tm /GS6 gs 0 g [(1)] TJ ET EMC /P <</MCID 86 >> BDC BT 1 0 0 -1 144.84199524 8.35599995 Tm [( )] TJ ET EMC /P <</MCID 87 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 146.46699524 11.38599968 Tm [(ACM)] TJ ET EMC /P <</MCID 88 >> BDC BT 1 0 0 -1 169.25 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 89 >> BDC BT 1 0 0 -1 171.75 11.38599968 Tm [(Research)] TJ ET EMC /P <</MCID 90 >> BDC BT 1 0 0 -1 208.39599609 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 91 >> BDC BT 1 0 0 -1 210.89599609 11.38599968 Tm [(\(Shanghai\),)] TJ ET EMC /P <</MCID 92 >> BDC BT 1 0 0 -1 257.27301025 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 93 >> BDC BT 1 0 0 -1 259.77301025 11.38599968 Tm [(Inc.,)] TJ ET EMC /P <</MCID 94 >> BDC BT 1 0 0 -1 277.54199219 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 95 >> BDC BT 1 0 0 -1 280.04199219 11.38599968 Tm [(Pudong,)] TJ ET EMC /P <</MCID 96 >> BDC BT 1 0 0 -1 313.10400391 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 97 >> BDC BT 1 0 0 -1 315.60400391 11.38599968 Tm [(Shanghai,)] TJ ET EMC /P <</MCID 98 >> BDC BT 1 0 0 -1 355.3210144 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 99 >> BDC BT 1 0 0 -1 357.8210144 11.38599968 Tm [(China)] TJ ET EMC /P <</MCID 100 >> BDC BT /FAAACG 11 Tf 1 0 0 -1 381.70800781 11.38599968 Tm /GS7 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 93.59999847 cm /P <</MCID 101 >> BDC BT /FAAABG 6.5 Tf 1 0 0 -1 120.89900208 8.35599995 Tm /GS8 gs 0 g [(2)] TJ ET EMC /P <</MCID 102 >> BDC BT 1 0 0 -1 124.14900208 8.35599995 Tm [( )] TJ ET EMC /P <</MCID 103 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 125.77400208 11.38599968 Tm [(Anji)] TJ ET EMC /P <</MCID 104 >> BDC BT 1 0 0 -1 143.55200195 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 105 >> BDC BT 1 0 0 -1 146.05200195 11.38599968 Tm [(Microele)1(ctronics)] TJ ET EMC /P <</MCID 106 >> BDC BT 1 0 0 -1 213.80099487 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 107 >> BDC BT 1 0 0 -1 216.30099487 11.38599968 Tm [(\(Shanghai\))] TJ ET EMC /P <</MCID 108 >> BDC BT 1 0 0 -1 260.17800903 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 109 >> BDC BT 1 0 0 -1 262.67800903 11.38599968 Tm [(Co.,Ltd.,)] TJ ET EMC /P <</MCID 110 >> BDC BT 1 0 0 -1 298.23498535 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 111 >> BDC BT 1 0 0 -1 300.73498535 11.38599968 Tm [(Pudong,)] TJ ET EMC /P <</MCID 112 >> BDC BT 1 0 0 -1 333.79699707 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 113 >> BDC BT 1 0 0 -1 336.29699707 11.38599968 Tm [(Shanghai,)] TJ ET EMC /P <</MCID 114 >> BDC BT 1 0 0 -1 376.01400757 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 115 >> BDC BT 1 0 0 -1 378.51400757 11.38599968 Tm [(China)] TJ ET EMC /P <</MCID 116 >> BDC BT /FAAACG 11 Tf 1 0 0 -1 402.40100098 11.38599968 Tm /GS9 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 109.19999695 cm /P <</MCID 117 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 129.42599487 11.38599968 Tm /GS10 gs 0 g [(E-mai)1(l:)] TJ ET EMC /P <</MCID 118 >> BDC BT 1 0 0 -1 159.41600037 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 119 >> BDC BT 1 0 0 -1 161.91600037 11.38599968 Tm 0 0 1 rg [(hedy.yao@a)1(cmrcsh.com)] TJ ET EMC /P <</MCID 120 >> BDC BT 1 0 0 -1 260.53399658 11.38599968 Tm [(,)] TJ ET EMC /P <</MCID 121 >> BDC BT 1 0 0 -1 263.03399658 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 122 >> BDC BT 1 0 0 -1 265.53399658 11.38599968 Tm [(dongqiangche)1(n@anjimi)1(cro.com)] TJ ET EMC /P <</MCID 123 >> BDC BT 1 0 0 -1 393.87399292 11.38599968 Tm /GS11 gs 0 g [( )] TJ ET EMC /P <</MCID 124 >> BDC q /GS12 gs 0 0 1 RG 0.5 w 161.91600037 12.76099968 m 393.87399292 12.76099968 l S Q EMC Q q 1 0 0 1 0 124.80000305 cm /P <</MCID 125 >> BDC BT /FAAADG 10 Tf 1 0 0 -1 0 11.21700001 Tm [( )] TJ ET EMC Q q 1 0 0 1 5.97700024 124.80000305 cm Q Q q 1 0 0 1 56.70000076 176.3999939 cm /P <</MCID 126 >> BDC BT /FAAAAH 11 Tf 1 0 0 -1 94.69599915 11.74499989 Tm 0 g [(Abstract)] TJ ET EMC /P <</MCID 127 >> BDC BT 1 0 0 -1 135.6289978 11.74499989 Tm /GS13 gs 0 g [( )] TJ ET EMC q 1 0 0 1 0 15.60000038 cm /P <</MCID 128 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm /GS14 gs 0 g [(Among)] TJ ET EMC /P <</MCID 129 >> BDC BT 1 0 0 -1 30 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 130 >> BDC BT 1 0 0 -1 32.5 11.38599968 Tm [(the)] TJ ET EMC /P <</MCID 131 >> BDC BT 1 0 0 -1 44.71699905 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 132 >> BDC BT 1 0 0 -1 47.21699905 11.38599968 Tm [(techni)1(cal)] TJ ET EMC /P <</MCID 133 >> BDC BT 1 0 0 -1 83.30599976 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 134 >> BDC BT 1 0 0 -1 85.80599976 11.38599968 Tm [(nodes)] TJ ET EMC /P <</MCID 135 >> BDC BT 1 0 0 -1 109.13600159 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 136 >> BDC BT 1 0 0 -1 111.63600159 11.38599968 Tm [(at)] TJ ET EMC /P <</MCID 137 >> BDC BT 1 0 0 -1 118.85299683 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 138 >> BDC BT 1 0 0 -1 121.35299683 11.38599968 Tm [(90nm)] TJ ET EMC /P <</MCID 139 >> BDC BT 1 0 0 -1 144.1309967 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 140 >> BDC BT 1 0 0 -1 146.6309967 11.38599968 Tm [(and)] TJ ET EMC /P <</MCID 141 >> BDC BT 1 0 0 -1 161.06900024 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 142 >> BDC BT 1 0 0 -1 163.56900024 11.38599968 Tm [(below,)] TJ ET EMC /P <</MCID 143 >> BDC BT 1 0 0 -1 190.50700378 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 144 >> BDC BT 1 0 0 -1 0 26.98600006 Tm [(copper/l)1(ow)-1(-k)] TJ ET EMC /P <</MCID 145 >> BDC BT 1 0 0 -1 53.31499863 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 146 >> BDC BT 1 0 0 -1 55.81499863 26.98600006 Tm [(interc)1(onnect)] TJ ET EMC /P <</MCID 147 >> BDC BT 1 0 0 -1 105.23400116 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 148 >> BDC BT 1 0 0 -1 107.73400116 26.98600006 Tm [(possesses)] TJ ET EMC /P <</MCID 149 >> BDC BT 1 0 0 -1 146.06900024 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 150 >> BDC BT 1 0 0 -1 148.56900024 26.98600006 Tm [(the)] TJ ET EMC /P <</MCID 151 >> BDC BT 1 0 0 -1 160.78599548 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 152 >> BDC BT 1 0 0 -1 163.28599548 26.98600006 Tm [(charac)1(teristics)] TJ ET EMC /P <</MCID 153 >> BDC BT 1 0 0 -1 220.47399902 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 154 >> BDC BT 1 0 0 -1 0 42.58599854 Tm [(of)] TJ ET EMC /P <</MCID 155 >> BDC BT 1 0 0 -1 8.32999992 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 156 >> BDC BT 1 0 0 -1 10.82999992 42.58599854 Tm [(falli)1(ng)] TJ ET EMC /P <</MCID 157 >> BDC BT 1 0 0 -1 36.93399811 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 158 >> BDC BT 1 0 0 -1 39.43399811 42.58599854 Tm [(resistive-c)1(apaciti)1(ve)] TJ ET EMC /P <</MCID 159 >> BDC BT 1 0 0 -1 116.61699677 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 160 >> BDC BT 1 0 0 -1 119.11699677 42.58599854 Tm [(\(RC\))] TJ ET EMC /P <</MCID 161 >> BDC BT 1 0 0 -1 139.11700439 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 162 >> BDC BT 1 0 0 -1 141.61700439 42.58599854 Tm [(delay,)] TJ ET EMC /P <</MCID 163 >> BDC BT 1 0 0 -1 165.77200317 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 164 >> BDC BT 1 0 0 -1 168.27200317 42.58599854 Tm [(low)] TJ ET EMC /P <</MCID 165 >> BDC BT 1 0 0 -1 183.27200317 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 166 >> BDC BT 1 0 0 -1 0 58.18599701 Tm [(interc)1(onnect)] TJ ET EMC /P <</MCID 167 >> BDC BT 1 0 0 -1 49.41899872 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 168 >> BDC BT 1 0 0 -1 51.91899872 58.18599701 Tm [(resistance)] TJ ET EMC /P <</MCID 169 >> BDC BT 1 0 0 -1 91.34300232 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 170 >> BDC BT 1 0 0 -1 93.84300232 58.18599701 Tm [(and)] TJ ET EMC /P <</MCID 171 >> BDC BT 1 0 0 -1 108.28099823 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 172 >> BDC BT 1 0 0 -1 110.78099823 58.18599701 Tm [(high)] TJ ET EMC /P <</MCID 173 >> BDC BT 1 0 0 -1 128.55900574 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 174 >> BDC BT 1 0 0 -1 131.05900574 58.18599701 Tm [(relia)1(bility,)] TJ ET EMC /P <</MCID 175 >> BDC BT 1 0 0 -1 172.43600464 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 176 >> BDC BT 1 0 0 -1 174.93600464 58.18599701 Tm [(which)] TJ ET EMC /P <</MCID 177 >> BDC BT 1 0 0 -1 199.37399292 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 178 >> BDC BT 1 0 0 -1 201.87399292 58.18599701 Tm [(is)] TJ ET EMC /P <</MCID 179 >> BDC BT 1 0 0 -1 208.54400635 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 180 >> BDC BT 1 0 0 -1 0 73.78600311 Tm [(commonl)1(y)] TJ ET EMC /P <</MCID 181 >> BDC BT 1 0 0 -1 42.77299881 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 182 >> BDC BT 1 0 0 -1 45.27299881 73.78600311 Tm [(used)] TJ ET EMC /P <</MCID 183 >> BDC BT 1 0 0 -1 63.60300064 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 184 >> BDC BT 1 0 0 -1 66.10299683 73.78600311 Tm [(to)] TJ ET EMC /P <</MCID 185 >> BDC BT 1 0 0 -1 73.8809967 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 186 >> BDC BT 1 0 0 -1 76.3809967 73.78600311 Tm [(replac)1(e)] TJ ET EMC /P <</MCID 187 >> BDC BT 1 0 0 -1 105.24299622 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 188 >> BDC BT 1 0 0 -1 107.74299622 73.78600311 Tm [(tradit)1(ional)] TJ ET EMC /P <</MCID 189 >> BDC BT 1 0 0 -1 148.84199524 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 190 >> BDC BT 1 0 0 -1 151.34199524 73.78600311 Tm [(alumi)1(num/silicon)] TJ ET EMC /P <</MCID 191 >> BDC BT 1 0 0 -1 221.33700562 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 192 >> BDC BT 1 0 0 -1 0 89.38600159 Tm [(dioxide)] TJ ET EMC /P <</MCID 193 >> BDC BT 1 0 0 -1 29.99500084 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 194 >> BDC BT 1 0 0 -1 32.49499893 89.38600159 Tm [(in)] TJ ET EMC /P <</MCID 195 >> BDC BT 1 0 0 -1 40.27299881 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 196 >> BDC BT 1 0 0 -1 42.77299881 89.38600159 Tm [(interc)1(onnection)] TJ ET EMC /P <</MCID 197 >> BDC BT 1 0 0 -1 104.97000122 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 198 >> BDC BT 1 0 0 -1 107.47000122 89.38600159 Tm [(technol)1(ogy.)] TJ ET EMC /P <</MCID 199 >> BDC BT 1 0 0 -1 154.40400696 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 200 >> BDC BT 1 0 0 -1 156.90400696 89.38600159 Tm [(Since)] TJ ET EMC /P <</MCID 201 >> BDC BT 1 0 0 -1 179.1210022 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 202 >> BDC BT 1 0 0 -1 181.6210022 89.38600159 Tm [(copper)] TJ ET EMC /P <</MCID 203 >> BDC BT 1 0 0 -1 208.82800293 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 204 >> BDC BT 1 0 0 -1 0 104.98600006 Tm [(cannot)] TJ ET EMC /P <</MCID 205 >> BDC BT 1 0 0 -1 26.65500069 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 206 >> BDC BT 1 0 0 -1 29.15500069 104.98600006 Tm [(react)] TJ ET EMC /P <</MCID 207 >> BDC BT 1 0 0 -1 48.57899857 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 208 >> BDC BT 1 0 0 -1 51.07899857 104.98600006 Tm [(with)] TJ ET EMC /P <</MCID 209 >> BDC BT 1 0 0 -1 68.85700226 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 210 >> BDC BT 1 0 0 -1 71.35700226 104.98600006 Tm [(the)] TJ ET EMC /P <</MCID 211 >> BDC BT 1 0 0 -1 83.5739975 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 212 >> BDC BT 1 0 0 -1 86.0739975 104.98600006 Tm [(etch)] TJ ET EMC /P <</MCID 213 >> BDC BT 1 0 0 -1 102.72899628 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 214 >> BDC BT 1 0 0 -1 105.22899628 104.98600006 Tm [(gas)] TJ ET EMC /P <</MCID 215 >> BDC BT 1 0 0 -1 118.55899811 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 216 >> BDC BT 1 0 0 -1 121.05899811 104.98600006 Tm [(to)] TJ ET EMC /P <</MCID 217 >> BDC BT 1 0 0 -1 128.83700562 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 218 >> BDC BT 1 0 0 -1 131.33700562 104.98600006 Tm [(form)] TJ ET EMC /P <</MCID 219 >> BDC BT 1 0 0 -1 150.7749939 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 220 >> BDC BT 1 0 0 -1 153.2749939 104.98600006 Tm [(volati)1(le)] TJ ET EMC /P <</MCID 221 >> BDC BT 1 0 0 -1 183.26499939 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 222 >> BDC BT 1 0 0 -1 185.76499939 104.98600006 Tm [(by-)] TJ ET EMC /P <</MCID 223 >> BDC BT 1 0 0 -1 0 120.58599854 Tm [(products,)] TJ ET EMC /P <</MCID 224 >> BDC BT 1 0 0 -1 36.93799973 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 225 >> BDC BT 1 0 0 -1 39.43799973 120.58599854 Tm [(copper)] TJ ET EMC /P <</MCID 226 >> BDC BT 1 0 0 -1 66.64499664 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 227 >> BDC BT 1 0 0 -1 69.14499664 120.58599854 Tm [(meta)1(llizat)1(ion)] TJ ET EMC /P <</MCID 228 >> BDC BT 1 0 0 -1 121.34700012 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 229 >> BDC BT 1 0 0 -1 123.84700012 120.58599854 Tm [(is)] TJ ET EMC /P <</MCID 230 >> BDC BT 1 0 0 -1 130.51699829 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 231 >> BDC BT 1 0 0 -1 133.01699829 120.58599854 Tm [(unsuitable)] TJ ET EMC /P <</MCID 232 >> BDC BT 1 0 0 -1 174.1210022 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 233 >> BDC BT 1 0 0 -1 176.6210022 120.58599854 Tm [(for)] TJ ET EMC /P <</MCID 234 >> BDC BT 1 0 0 -1 188.28100586 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 235 >> BDC BT 1 0 0 -1 190.78100586 120.58599854 Tm [(the)] TJ ET EMC /P <</MCID 236 >> BDC BT 1 0 0 -1 202.9980011 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 237 >> BDC BT 1 0 0 -1 0 136.18600464 Tm [(process)] TJ ET EMC /P <</MCID 238 >> BDC BT 1 0 0 -1 29.98999977 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 239 >> BDC BT 1 0 0 -1 32.49000168 136.18600464 Tm [(of)] TJ ET EMC /P <</MCID 240 >> BDC BT 1 0 0 -1 40.81999969 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 241 >> BDC BT 1 0 0 -1 43.31999969 136.18600464 Tm [(dry)] TJ ET EMC /P <</MCID 242 >> BDC BT 1 0 0 -1 56.65000153 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 243 >> BDC BT 1 0 0 -1 59.15000153 136.18600464 Tm [(etchi)1(ng,)] TJ ET EMC /P <</MCID 244 >> BDC BT 1 0 0 -1 91.08399963 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 245 >> BDC BT 1 0 0 -1 93.58399963 136.18600464 Tm [(and)] TJ ET EMC /P <</MCID 246 >> BDC BT 1 0 0 -1 108.02200317 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 247 >> BDC BT 1 0 0 -1 110.52200317 136.18600464 Tm [(dual)] TJ ET EMC /P <</MCID 248 >> BDC BT 1 0 0 -1 127.73899841 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 249 >> BDC BT 1 0 0 -1 130.23899841 136.18600464 Tm [(damasce)1(ne)] TJ ET EMC /P <</MCID 250 >> BDC BT 1 0 0 -1 174.10099792 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 251 >> BDC BT 1 0 0 -1 176.60099792 136.18600464 Tm [(integra)1(tion)] TJ ET EMC /P <</MCID 252 >> BDC BT 1 0 0 -1 219.92100525 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 253 >> BDC BT 1 0 0 -1 0 151.78599548 Tm [(scheme)] TJ ET EMC /P <</MCID 254 >> BDC BT 1 0 0 -1 29.98500061 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 255 >> BDC BT 1 0 0 -1 32.48500061 151.78599548 Tm [(is)] TJ ET EMC /P <</MCID 256 >> BDC BT 1 0 0 -1 39.15499878 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 257 >> BDC BT 1 0 0 -1 41.65499878 151.78599548 Tm [(used)] TJ ET EMC /P <</MCID 258 >> BDC BT 1 0 0 -1 59.98500061 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 259 >> BDC BT 1 0 0 -1 62.48500061 151.78599548 Tm [(for)] TJ ET EMC /P <</MCID 260 >> BDC BT 1 0 0 -1 74.14499664 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 261 >> BDC BT 1 0 0 -1 76.64499664 151.78599548 Tm [(BEOL)] TJ ET EMC /P <</MCID 262 >> BDC BT 1 0 0 -1 102.75299835 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 263 >> BDC BT 1 0 0 -1 105.25299835 151.78599548 Tm [(interc)1(onnection.)] TJ ET EMC /P <</MCID 264 >> BDC BT 1 0 0 -1 169.94999695 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 265 >> BDC BT 1 0 0 -1 172.44999695 151.78599548 Tm [(The)] TJ ET EMC /P <</MCID 266 >> BDC BT 1 0 0 -1 187.99699402 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 267 >> BDC BT 1 0 0 -1 190.49699402 151.78599548 Tm [(wet)] TJ ET EMC /P <</MCID 268 >> BDC BT 1 0 0 -1 204.93499756 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 269 >> BDC BT 1 0 0 -1 0 167.38600159 Tm [(chemi)1(s)-1(t)1(ry)] TJ ET EMC /P <</MCID 270 >> BDC BT 1 0 0 -1 39.43399811 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 271 >> BDC BT 1 0 0 -1 41.93399811 167.38600159 Tm [(post-etch)] TJ ET EMC /P <</MCID 272 >> BDC BT 1 0 0 -1 78.58899689 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 273 >> BDC BT 1 0 0 -1 81.08899689 167.38600159 Tm [(clea)1(n)] TJ ET EMC /P <</MCID 274 >> BDC BT 1 0 0 -1 102.18299866 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 275 >> BDC BT 1 0 0 -1 104.68299866 167.38600159 Tm [(is)] TJ ET EMC /P <</MCID 276 >> BDC BT 1 0 0 -1 111.35299683 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 277 >> BDC BT 1 0 0 -1 113.85299683 167.38600159 Tm [(an)] TJ ET EMC /P <</MCID 278 >> BDC BT 1 0 0 -1 123.29100037 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 279 >> BDC BT 1 0 0 -1 125.79100037 167.38600159 Tm [(essential)] TJ ET EMC /P <</MCID 280 >> BDC BT 1 0 0 -1 160.2250061 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 281 >> BDC BT 1 0 0 -1 162.7250061 167.38600159 Tm [(step)] TJ ET EMC /P <</MCID 282 >> BDC BT 1 0 0 -1 178.83299255 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 283 >> BDC BT 1 0 0 -1 181.33299255 167.38600159 Tm [(in)] TJ ET EMC /P <</MCID 284 >> BDC BT 1 0 0 -1 189.11099243 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 285 >> BDC BT 1 0 0 -1 191.61099243 167.38600159 Tm [(dual)] TJ ET EMC /P <</MCID 286 >> BDC BT 1 0 0 -1 208.82800293 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 287 >> BDC BT 1 0 0 -1 0 182.98600769 Tm [(damasce)1(ne)] TJ ET EMC /P <</MCID 288 >> BDC BT 1 0 0 -1 43.86199951 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 289 >> BDC BT 1 0 0 -1 46.36199951 182.98600769 Tm [(technol)1(ogy,)] TJ ET EMC /P <</MCID 290 >> BDC BT 1 0 0 -1 93.29599762 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 291 >> BDC BT 1 0 0 -1 95.79599762 182.98600769 Tm [(and)] TJ ET EMC /P <</MCID 292 >> BDC BT 1 0 0 -1 110.23400116 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 293 >> BDC BT 1 0 0 -1 112.73400116 182.98600769 Tm [(it)] TJ ET EMC /P <</MCID 294 >> BDC BT 1 0 0 -1 118.29100037 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 295 >> BDC BT 1 0 0 -1 120.79100037 182.98600769 Tm [(is)] TJ ET EMC /P <</MCID 296 >> BDC BT 1 0 0 -1 127.46099854 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 297 >> BDC BT 1 0 0 -1 129.96099854 182.98600769 Tm [(primari)1(ly)] TJ ET EMC /P <</MCID 298 >> BDC BT 1 0 0 -1 167.17300415 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 299 >> BDC BT 1 0 0 -1 169.67300415 182.98600769 Tm [(used)] TJ ET EMC /P <</MCID 300 >> BDC BT 1 0 0 -1 188.00300598 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 301 >> BDC BT 1 0 0 -1 190.50300598 182.98600769 Tm [(to)] TJ ET EMC /P <</MCID 302 >> BDC BT 1 0 0 -1 198.28100586 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 303 >> BDC BT 1 0 0 -1 0 198.58599854 Tm [(eradic)1(ate)] TJ ET EMC /P <</MCID 304 >> BDC BT 1 0 0 -1 36.07899857 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 305 >> BDC BT 1 0 0 -1 38.57899857 198.58599854 Tm [(the)] TJ ET EMC /P <</MCID 306 >> BDC BT 1 0 0 -1 50.79600143 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 307 >> BDC BT 1 0 0 -1 53.29600143 198.58599854 Tm [(post)] TJ ET EMC /P <</MCID 308 >> BDC BT 1 0 0 -1 69.96600342 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 309 >> BDC BT 1 0 0 -1 72.46600342 198.58599854 Tm [(etch)] TJ ET EMC /P <</MCID 310 >> BDC BT 1 0 0 -1 89.1210022 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 311 >> BDC BT 1 0 0 -1 91.6210022 198.58599854 Tm [(residue.)] TJ ET EMC /P <</MCID 312 >> BDC BT 1 0 0 -1 122.9980011 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 313 >> BDC BT 1 0 0 -1 125.4980011 198.58599854 Tm [(Throughout)] TJ ET EMC /P <</MCID 314 >> BDC BT 1 0 0 -1 172.71499634 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 315 >> BDC BT 1 0 0 -1 175.21499634 198.58599854 Tm [(the)] TJ ET EMC /P <</MCID 316 >> BDC BT 1 0 0 -1 187.43200684 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 317 >> BDC BT 1 0 0 -1 189.93200684 198.58599854 Tm [(clea)1(ning)] TJ ET EMC /P <</MCID 318 >> BDC BT 1 0 0 -1 223.80400085 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 319 >> BDC BT 1 0 0 -1 0 214.18600464 Tm [(process,)] TJ ET EMC /P <</MCID 320 >> BDC BT 1 0 0 -1 32.49000168 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 321 >> BDC BT 1 0 0 -1 34.99000168 214.18600464 Tm [(low-k,)] TJ ET EMC /P <</MCID 322 >> BDC BT 1 0 0 -1 60.81999969 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 323 >> BDC BT 1 0 0 -1 63.31999969 214.18600464 Tm [(Cu,)] TJ ET EMC /P <</MCID 324 >> BDC BT 1 0 0 -1 77.48999786 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 325 >> BDC BT 1 0 0 -1 79.98999786 214.18600464 Tm [(Ta/T)1(aN)] TJ ET EMC /P <</MCID 326 >> BDC BT 1 0 0 -1 111.08399963 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 327 >> BDC BT 1 0 0 -1 113.58399963 214.18600464 Tm [(and)] TJ ET EMC /P <</MCID 328 >> BDC BT 1 0 0 -1 128.02200317 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 329 >> BDC BT 1 0 0 -1 130.52200317 214.18600464 Tm [(other)] TJ ET EMC /P <</MCID 330 >> BDC BT 1 0 0 -1 151.06900024 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 331 >> BDC BT 1 0 0 -1 153.56900024 214.18600464 Tm [(films)] TJ ET EMC /P <</MCID 332 >> BDC BT 1 0 0 -1 174.12600708 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 333 >> BDC BT 1 0 0 -1 176.62600708 214.18600464 Tm [(in)] TJ ET EMC /P <</MCID 334 >> BDC BT 1 0 0 -1 184.40400696 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 335 >> BDC BT 1 0 0 -1 0 229.78599548 Tm [(damasce)1(ne)] TJ ET EMC /P <</MCID 336 >> BDC BT 1 0 0 -1 43.86199951 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 337 >> BDC BT 1 0 0 -1 46.36199951 229.78599548 Tm [(will)] TJ ET EMC /P <</MCID 338 >> BDC BT 1 0 0 -1 61.91899872 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 339 >> BDC BT 1 0 0 -1 64.41899872 229.78599548 Tm [(be)] TJ ET EMC /P <</MCID 340 >> BDC BT 1 0 0 -1 73.85700226 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 341 >> BDC BT 1 0 0 -1 76.35700226 229.78599548 Tm [(exposed.)] TJ ET EMC /P <</MCID 342 >> BDC BT 1 0 0 -1 111.62599945 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 343 >> BDC BT 1 0 0 -1 114.12599945 229.78599548 Tm [(Consequently,)] TJ ET EMC /P <</MCID 344 >> BDC BT 1 0 0 -1 171.6210022 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 345 >> BDC BT 1 0 0 -1 174.1210022 229.78599548 Tm [(the)] TJ ET EMC /P <</MCID 346 >> BDC BT 1 0 0 -1 186.33799744 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 347 >> BDC BT 1 0 0 -1 188.83799744 229.78599548 Tm [(clea)1(ning)] TJ ET EMC /P <</MCID 348 >> BDC BT 1 0 0 -1 222.71000671 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 349 >> BDC BT 1 0 0 -1 0 245.38600159 Tm [(solution)] TJ ET EMC /P <</MCID 350 >> BDC BT 1 0 0 -1 32.22700119 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 351 >> BDC BT 1 0 0 -1 34.72700119 245.38600159 Tm [(must)] TJ ET EMC /P <</MCID 352 >> BDC BT 1 0 0 -1 54.17499924 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 353 >> BDC BT 1 0 0 -1 56.67499924 245.38600159 Tm [(do)] TJ ET EMC /P <</MCID 354 >> BDC BT 1 0 0 -1 66.67500305 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 355 >> BDC BT 1 0 0 -1 69.17500305 245.38600159 Tm [(less)] TJ ET EMC /P <</MCID 356 >> BDC BT 1 0 0 -1 84.17500305 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 357 >> BDC BT 1 0 0 -1 86.67500305 245.38600159 Tm [(damage)] TJ ET EMC /P <</MCID 358 >> BDC BT 1 0 0 -1 117.76899719 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 359 >> BDC BT 1 0 0 -1 120.26899719 245.38600159 Tm [(to)] TJ ET EMC /P <</MCID 360 >> BDC BT 1 0 0 -1 128.04699707 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 361 >> BDC BT 1 0 0 -1 130.54699707 245.38600159 Tm [(numerous)] TJ ET EMC /P <</MCID 362 >> BDC BT 1 0 0 -1 169.98500061 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 363 >> BDC BT 1 0 0 -1 172.48500061 245.38600159 Tm [(mate)1(rials.)] TJ ET EMC /P <</MCID 364 >> BDC BT 1 0 0 -1 211.63499451 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 365 >> BDC BT 1 0 0 -1 214.13499451 245.38600159 Tm [(In)] TJ ET EMC /P <</MCID 366 >> BDC BT 1 0 0 -1 222.46499634 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 367 >> BDC BT 1 0 0 -1 0 260.98599243 Tm [(this)] TJ ET EMC /P <</MCID 368 >> BDC BT 1 0 0 -1 14.44799995 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 369 >> BDC BT 1 0 0 -1 16.94799995 260.98599243 Tm [(work,)] TJ ET EMC /P <</MCID 370 >> BDC BT 1 0 0 -1 40 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 371 >> BDC BT 1 0 0 -1 42.5 260.98599243 Tm [(two)] TJ ET EMC /P <</MCID 372 >> BDC BT 1 0 0 -1 57.5 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 373 >> BDC BT 1 0 0 -1 60 260.98599243 Tm [(types)] TJ ET EMC /P <</MCID 374 >> BDC BT 1 0 0 -1 81.10800171 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 375 >> BDC BT 1 0 0 -1 83.60800171 260.98599243 Tm [(of)] TJ ET EMC /P <</MCID 376 >> BDC BT 1 0 0 -1 91.93800354 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 377 >> BDC BT 1 0 0 -1 94.43800354 260.98599243 Tm [(semi-aque)1(ous)] TJ ET EMC /P <</MCID 378 >> BDC BT 1 0 0 -1 149.42300415 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 379 >> BDC BT 1 0 0 -1 151.92300415 260.98599243 Tm [(wet)] TJ ET EMC /P <</MCID 380 >> BDC BT 1 0 0 -1 166.36099243 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 381 >> BDC BT 1 0 0 -1 168.86099243 260.98599243 Tm [(clea)1(n)] TJ ET EMC /P <</MCID 382 >> BDC BT 1 0 0 -1 189.95500183 260.98599243 Tm [( )] TJ ET EMC /P <</MCID 383 >> BDC BT 1 0 0 -1 0 276.58599854 Tm [(chemi)1(cals)] TJ ET EMC /P <</MCID 384 >> BDC BT 1 0 0 -1 39.97999954 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 385 >> BDC BT 1 0 0 -1 42.47999954 276.58599854 Tm [(\(ST250)] TJ ET EMC /P <</MCID 386 >> BDC BT 1 0 0 -1 72.48000336 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 387 >> BDC BT 1 0 0 -1 74.98000336 276.58599854 Tm [(from)] TJ ET EMC /P <</MCID 388 >> BDC BT 1 0 0 -1 94.41799927 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 389 >> BDC BT 1 0 0 -1 96.91799927 276.58599854 Tm [(ATMI)] TJ ET EMC /P <</MCID 390 >> BDC BT 1 0 0 -1 122.47000122 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 391 >> BDC BT 1 0 0 -1 124.97000122 276.58599854 Tm [(and)] TJ ET EMC /P <</MCID 392 >> BDC BT 1 0 0 -1 139.40800476 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 393 >> BDC BT 1 0 0 -1 141.90800476 276.58599854 Tm [(ICS8000)] TJ ET EMC /P <</MCID 394 >> BDC BT 1 0 0 -1 177.47000122 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 395 >> BDC BT 1 0 0 -1 179.97000122 276.58599854 Tm [(from)] TJ ET EMC /P <</MCID 396 >> BDC BT 1 0 0 -1 199.40800476 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 397 >> BDC BT 1 0 0 -1 201.90800476 276.58599854 Tm [(Anji\))] TJ ET EMC /P <</MCID 398 >> BDC BT 1 0 0 -1 223.01600647 276.58599854 Tm [( )] TJ ET EMC /P <</MCID 399 >> BDC BT 1 0 0 -1 0 292.18597412 Tm [(are)] TJ ET EMC /P <</MCID 400 >> BDC BT 1 0 0 -1 12.20699978 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 401 >> BDC BT 1 0 0 -1 14.70699978 292.18597412 Tm [(tested)] TJ ET EMC /P <</MCID 402 >> BDC BT 1 0 0 -1 38.0320015 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 403 >> BDC BT 1 0 0 -1 40.5320015 292.18597412 Tm [(in)] TJ ET EMC /P <</MCID 404 >> BDC BT 1 0 0 -1 48.31000137 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 405 >> BDC BT 1 0 0 -1 50.81000137 292.18597412 Tm [(ACM)] TJ ET EMC /P <</MCID 406 >> BDC BT 1 0 0 -1 73.59300232 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 407 >> BDC BT 1 0 0 -1 76.09300232 292.18597412 Tm [(300mm)] TJ ET EMC /P <</MCID 408 >> BDC BT 1 0 0 -1 106.65000153 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 409 >> BDC BT 1 0 0 -1 109.15000153 292.18597412 Tm [(single)] TJ ET EMC /P <</MCID 410 >> BDC BT 1 0 0 -1 133.03700256 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 411 >> BDC BT 1 0 0 -1 135.53700256 292.18597412 Tm [(clea)1(n)] TJ ET EMC /P <</MCID 412 >> BDC BT 1 0 0 -1 156.6309967 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 413 >> BDC BT 1 0 0 -1 159.1309967 292.18597412 Tm [(tool.)] TJ ET EMC /P <</MCID 414 >> BDC BT 1 0 0 -1 177.18800354 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 415 >> BDC BT 1 0 0 -1 179.68800354 292.18597412 Tm [(In)] TJ ET EMC /P <</MCID 416 >> BDC BT 1 0 0 -1 188.01800537 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 417 >> BDC BT 1 0 0 -1 190.51800537 292.18597412 Tm [(the)] TJ ET EMC /P <</MCID 418 >> BDC BT 1 0 0 -1 202.73500061 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 419 >> BDC BT 1 0 0 -1 205.23500061 292.18597412 Tm [(past,)] TJ ET EMC /P <</MCID 420 >> BDC BT 1 0 0 -1 223.84300232 292.18597412 Tm [( )] TJ ET EMC /P <</MCID 421 >> BDC BT 1 0 0 -1 0 307.78598022 Tm [(many)] TJ ET EMC /P <</MCID 422 >> BDC BT 1 0 0 -1 22.21699905 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 423 >> BDC BT 1 0 0 -1 24.71699905 307.78598022 Tm [(factori)1(es)] TJ ET EMC /P <</MCID 424 >> BDC BT 1 0 0 -1 59.14099884 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 425 >> BDC BT 1 0 0 -1 61.64099884 307.78598022 Tm [(struggled)] TJ ET EMC /P <</MCID 426 >> BDC BT 1 0 0 -1 98.85800171 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 427 >> BDC BT 1 0 0 -1 101.35800171 307.78598022 Tm [(with)] TJ ET EMC /P <</MCID 428 >> BDC BT 1 0 0 -1 119.13600159 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 429 >> BDC BT 1 0 0 -1 121.63600159 307.78598022 Tm [(the)] TJ ET EMC /P <</MCID 430 >> BDC BT 1 0 0 -1 133.85299683 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 431 >> BDC BT 1 0 0 -1 136.35299683 307.78598022 Tm [(ball-t)1(ype)] TJ ET EMC /P <</MCID 432 >> BDC BT 1 0 0 -1 171.89500427 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 433 >> BDC BT 1 0 0 -1 174.39500427 307.78598022 Tm [(defect)1(s)] TJ ET EMC /P <</MCID 434 >> BDC BT 1 0 0 -1 202.71000671 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 435 >> BDC BT 1 0 0 -1 205.21000671 307.78598022 Tm [(when)] TJ ET EMC /P <</MCID 436 >> BDC BT 1 0 0 -1 226.86999512 307.78598022 Tm [( )] TJ ET EMC /P <</MCID 437 >> BDC BT 1 0 0 -1 0 323.38598633 Tm [(using)] TJ ET EMC /P <</MCID 438 >> BDC BT 1 0 0 -1 21.67000008 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 439 >> BDC BT 1 0 0 -1 24.17000008 323.38598633 Tm [(ST250)] TJ ET EMC /P <</MCID 440 >> BDC BT 1 0 0 -1 50.84000015 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 441 >> BDC BT 1 0 0 -1 53.34000015 323.38598633 Tm [(as)] TJ ET EMC /P <</MCID 442 >> BDC BT 1 0 0 -1 61.66999817 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 443 >> BDC BT 1 0 0 -1 64.16999817 323.38598633 Tm [(post)] TJ ET EMC /P <</MCID 444 >> BDC BT 1 0 0 -1 80.83999634 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 445 >> BDC BT 1 0 0 -1 83.33999634 323.38598633 Tm [(etch)] TJ ET EMC /P <</MCID 446 >> BDC BT 1 0 0 -1 99.99500275 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 447 >> BDC BT 1 0 0 -1 102.49500275 323.38598633 Tm [(polymer)] TJ ET EMC /P <</MCID 448 >> BDC BT 1 0 0 -1 135.82000732 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 449 >> BDC BT 1 0 0 -1 138.32000732 323.38598633 Tm [(remover.)] TJ ET EMC /P <</MCID 450 >> BDC BT 1 0 0 -1 174.13499451 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 451 >> BDC BT 1 0 0 -1 176.63499451 323.38598633 Tm [(We)] TJ ET EMC /P <</MCID 452 >> BDC BT 1 0 0 -1 190.51199341 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 453 >> BDC BT 1 0 0 -1 193.01199341 323.38598633 Tm [(keep)] TJ ET EMC /P <</MCID 454 >> BDC BT 1 0 0 -1 211.88900757 323.38598633 Tm [( )] TJ ET EMC /P <</MCID 455 >> BDC BT 1 0 0 -1 0 338.98599243 Tm [(addressing)] TJ ET EMC /P <</MCID 456 >> BDC BT 1 0 0 -1 42.76900101 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 457 >> BDC BT 1 0 0 -1 45.26900101 338.98599243 Tm [(the)] TJ ET EMC /P <</MCID 458 >> BDC BT 1 0 0 -1 57.48600006 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 459 >> BDC BT 1 0 0 -1 59.98600006 338.98599243 Tm [(ball-t)1(ype)] TJ ET EMC /P <</MCID 460 >> BDC BT 1 0 0 -1 95.52799988 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 461 >> BDC BT 1 0 0 -1 98.02799988 338.98599243 Tm [(defect)1(s)] TJ ET EMC /P <</MCID 462 >> BDC BT 1 0 0 -1 126.34300232 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 463 >> BDC BT 1 0 0 -1 128.84300232 338.98599243 Tm [(by)] TJ ET EMC /P <</MCID 464 >> BDC BT 1 0 0 -1 138.84300232 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 465 >> BDC BT 1 0 0 -1 141.34300232 338.98599243 Tm [(proposing)] TJ ET EMC /P <</MCID 466 >> BDC BT 1 0 0 -1 181.34300232 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 467 >> BDC BT 1 0 0 -1 183.84300232 338.98599243 Tm [(one)] TJ ET EMC /P <</MCID 468 >> BDC BT 1 0 0 -1 198.28100586 338.98599243 Tm [( )] TJ ET EMC /P <</MCID 469 >> BDC BT 1 0 0 -1 0 354.58599854 Tm [(possible)] TJ ET EMC /P <</MCID 470 >> BDC BT 1 0 0 -1 32.77799988 354.58599854 Tm [( )] TJ ET EMC /P <</MCID 471 >> BDC BT 1 0 0 -1 35.27799988 354.58599854 Tm [(failure)] TJ ET EMC /P <</MCID 472 >> BDC BT 1 0 0 -1 61.37200165 354.58599854 Tm [( )] TJ ET EMC /P <</MCID 473 >> BDC BT 1 0 0 -1 63.87200165 354.58599854 Tm [(mecha)1(nism)] TJ ET EMC /P <</MCID 474 >> BDC BT 1 0 0 -1 109.41400146 354.58599854 Tm [( )] TJ ET EMC /P <</MCID 475 >> BDC BT 1 0 0 -1 111.91400146 354.58599854 Tm [(and)] TJ ET EMC /P <</MCID 476 >> BDC BT 1 0 0 -1 126.35199738 354.58599854 Tm [( )] TJ ET EMC /P <</MCID 477 >> BDC BT 1 0 0 -1 128.852005 354.58599854 Tm [(presenting)] TJ ET EMC /P <</MCID 478 >> BDC BT 1 0 0 -1 170.50700378 354.58599854 Tm [( )] TJ ET EMC /P <</MCID 479 >> BDC BT 1 0 0 -1 173.00700378 354.58599854 Tm [(several)] TJ ET EMC /P <</MCID 480 >> BDC BT 1 0 0 -1 201.32200623 354.58599854 Tm [( )] TJ ET EMC /P <</MCID 481 >> BDC BT 1 0 0 -1 0 370.18597412 Tm [(solutions.)] TJ ET EMC /P <</MCID 482 >> BDC BT 1 0 0 -1 38.61800003 370.18597412 Tm [( )] TJ ET EMC /P <</MCID 483 >> BDC BT 1 0 0 -1 41.11800003 370.18597412 Tm [(The)] TJ ET EMC /P <</MCID 484 >> BDC BT 1 0 0 -1 56.66500092 370.18597412 Tm [( )] TJ ET EMC /P <</MCID 485 >> BDC BT 1 0 0 -1 59.16500092 370.18597412 Tm [(photo-assistant)] TJ ET EMC /P <</MCID 486 >> BDC BT 1 0 0 -1 119.16000366 370.18597412 Tm [( )] TJ ET EMC /P <</MCID 487 >> BDC BT 1 0 0 -1 121.66000366 370.18597412 Tm [(copper)] TJ ET EMC /P <</MCID 488 >> BDC BT 1 0 0 -1 148.86700439 370.18597412 Tm [( )] TJ ET EMC /P <</MCID 489 >> BDC BT 1 0 0 -1 151.36700439 370.18597412 Tm [(corrosion)] TJ ET EMC /P <</MCID 490 >> BDC BT 1 0 0 -1 189.13600159 370.18597412 Tm [( )] TJ ET EMC /P <</MCID 491 >> BDC BT 1 0 0 -1 191.63600159 370.18597412 Tm [(and)] TJ ET EMC /P <</MCID 492 >> BDC BT 1 0 0 -1 206.07400513 370.18597412 Tm [( )] TJ ET EMC /P <</MCID 493 >> BDC BT 1 0 0 -1 0 385.78598022 Tm [(potenti)1(al)] TJ ET EMC /P <</MCID 494 >> BDC BT 1 0 0 -1 34.99000168 385.78598022 Tm [( )] TJ ET EMC /P <</MCID 495 >> BDC BT 1 0 0 -1 37.49000168 385.78598022 Tm [(chemi)1(cal)] TJ ET EMC /P <</MCID 496 >> BDC BT 1 0 0 -1 73.57900238 385.78598022 Tm [( )] TJ ET EMC /P <</MCID 497 >> BDC BT 1 0 0 -1 76.07900238 385.78598022 Tm [(residue)] TJ ET EMC /P <</MCID 498 >> BDC BT 1 0 0 -1 104.95600128 385.78598022 Tm [( )] TJ ET EMC /P <</MCID 499 >> BDC BT 1 0 0 -1 107.45600128 385.78598022 Tm [(problem)] TJ ET EMC /P <</MCID 500 >> BDC BT 1 0 0 -1 140.78100586 385.78598022 Tm [( )] TJ ET EMC /P <</MCID 501 >> BDC BT 1 0 0 -1 143.28100586 385.78598022 Tm [(are)] TJ ET EMC /P <</MCID 502 >> BDC BT 1 0 0 -1 155.48800659 385.78598022 Tm [( )] TJ ET EMC /P <</MCID 503 >> BDC BT 1 0 0 -1 157.98800659 385.78598022 Tm [(also)] TJ ET EMC /P <</MCID 504 >> BDC BT 1 0 0 -1 174.09599304 385.78598022 Tm [( )] TJ ET EMC /P <</MCID 505 >> BDC BT 1 0 0 -1 176.59599304 385.78598022 Tm [(discussed.)] TJ ET EMC /P <</MCID 506 >> BDC BT 1 0 0 -1 217.42599487 385.78598022 Tm /GS15 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 405.6000061 cm /P <</MCID 507 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 421.20001221 cm /P <</MCID 508 >> BDC BT 1 0 0 -1 0 11.74499989 Tm /GS16 gs 0 g [(1.)] TJ ET EMC /P <</MCID 509 >> BDC BT 1 0 0 -1 8.25 11.74499989 Tm [( )] TJ ET EMC /P <</MCID 510 >> BDC BT 1 0 0 -1 11 11.74499989 Tm [(Introduction)] TJ ET EMC /P <</MCID 511 >> BDC BT 1 0 0 -1 70.89800262 11.74499989 Tm /GS17 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 436.79998779 cm /P <</MCID 512 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm /GS18 gs 0 g [(Wet)] TJ ET EMC /P <</MCID 513 >> BDC BT 1 0 0 -1 16.65500069 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 514 >> BDC BT 1 0 0 -1 19.15500069 11.38599968 Tm [(chemi)1(s)-1(t)1(ry)] TJ ET EMC /P <</MCID 515 >> BDC BT 1 0 0 -1 58.5890007 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 516 >> BDC BT 1 0 0 -1 61.0890007 11.38599968 Tm [(post-etch)] TJ ET EMC /P <</MCID 517 >> BDC BT 1 0 0 -1 97.7440033 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 518 >> BDC BT 1 0 0 -1 100.2440033 11.38599968 Tm [(clea)1(n)] TJ ET EMC /P <</MCID 519 >> BDC BT 1 0 0 -1 121.33799744 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 520 >> BDC BT 1 0 0 -1 123.83799744 11.38599968 Tm [(is)] TJ ET EMC /P <</MCID 521 >> BDC BT 1 0 0 -1 130.50799561 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 522 >> BDC BT 1 0 0 -1 133.00799561 11.38599968 Tm [(vital)] TJ ET EMC /P <</MCID 523 >> BDC BT 1 0 0 -1 150.78100586 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 524 >> BDC BT 1 0 0 -1 153.28100586 11.38599968 Tm [(in)] TJ ET EMC /P <</MCID 525 >> BDC BT 1 0 0 -1 161.05900574 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 526 >> BDC BT 1 0 0 -1 163.55900574 11.38599968 Tm [(BEOL)] TJ ET EMC /P <</MCID 527 >> BDC BT 1 0 0 -1 189.66700745 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 528 >> BDC BT 1 0 0 -1 192.16700745 11.38599968 Tm [(process.)] TJ ET EMC /P <</MCID 529 >> BDC BT 1 0 0 -1 224.65699768 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 530 >> BDC BT 1 0 0 -1 0 26.98600006 Tm [(At)] TJ ET EMC /P <</MCID 531 >> BDC BT 1 0 0 -1 10 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 532 >> BDC BT 1 0 0 -1 12.5 26.98600006 Tm [(almost)] TJ ET EMC /P <</MCID 533 >> BDC BT 1 0 0 -1 39.16500092 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 534 >> BDC BT 1 0 0 -1 41.66500092 26.98600006 Tm [(every)] TJ ET EMC /P <</MCID 535 >> BDC BT 1 0 0 -1 63.87200165 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 536 >> BDC BT 1 0 0 -1 66.37200165 26.98600006 Tm [(few)] TJ ET EMC /P <</MCID 537 >> BDC BT 1 0 0 -1 81.36199951 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 538 >> BDC BT 1 0 0 -1 83.86199951 26.98600006 Tm [(steps)] TJ ET EMC /P <</MCID 539 >> BDC BT 1 0 0 -1 103.86199951 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 540 >> BDC BT 1 0 0 -1 106.36199951 26.98600006 Tm [(during)] TJ ET EMC /P <</MCID 541 >> BDC BT 1 0 0 -1 132.47000122 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 542 >> BDC BT 1 0 0 -1 134.97000122 26.98600006 Tm [(the)] TJ ET EMC /P <</MCID 543 >> BDC BT 1 0 0 -1 147.18699646 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 544 >> BDC BT 1 0 0 -1 149.68699646 26.98600006 Tm [(procedure,)] TJ ET EMC /P <</MCID 545 >> BDC BT 1 0 0 -1 192.16299438 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 546 >> BDC BT 1 0 0 -1 194.66299438 26.98600006 Tm [(clea)1(ning)] TJ ET EMC /P <</MCID 547 >> BDC BT 1 0 0 -1 228.53500366 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 548 >> BDC BT 1 0 0 -1 0 42.58599854 Tm [(is)] TJ ET EMC /P <</MCID 549 >> BDC BT 1 0 0 -1 6.67000008 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 550 >> BDC BT 1 0 0 -1 9.17000008 42.58599854 Tm [(involved.)] TJ ET EMC /P <</MCID 551 >> BDC BT 1 0 0 -1 46.66500092 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 552 >> BDC BT 1 0 0 -1 49.16500092 42.58599854 Tm [(The)] TJ ET EMC /P <</MCID 553 >> BDC BT 1 0 0 -1 64.71199799 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 554 >> BDC BT 1 0 0 -1 67.21199799 42.58599854 Tm [(qualit)1(y)] TJ ET EMC /P <</MCID 555 >> BDC BT 1 0 0 -1 94.98500061 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 556 >> BDC BT 1 0 0 -1 97.48500061 42.58599854 Tm [(of)] TJ ET EMC /P <</MCID 557 >> BDC BT 1 0 0 -1 105.81500244 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 558 >> BDC BT 1 0 0 -1 108.31500244 42.58599854 Tm [(silicon)] TJ ET EMC /P <</MCID 559 >> BDC BT 1 0 0 -1 134.97999573 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 560 >> BDC BT 1 0 0 -1 137.47999573 42.58599854 Tm [(wafer)] TJ ET EMC /P <</MCID 561 >> BDC BT 1 0 0 -1 160.23899841 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 562 >> BDC BT 1 0 0 -1 162.73899841 42.58599854 Tm [(clea)1(ning)] TJ ET EMC /P <</MCID 563 >> BDC BT 1 0 0 -1 196.61099243 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 564 >> BDC BT 1 0 0 -1 199.11099243 42.58599854 Tm [(direct)1(ly)] TJ ET EMC /P <</MCID 565 >> BDC BT 1 0 0 -1 229.65299988 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 566 >> BDC BT 1 0 0 -1 0 58.18599701 Tm [(impac)1(ts)] TJ ET EMC /P <</MCID 567 >> BDC BT 1 0 0 -1 31.10400009 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 568 >> BDC BT 1 0 0 -1 33.60400009 58.18599701 Tm [(the)] TJ ET EMC /P <</MCID 569 >> BDC BT 1 0 0 -1 45.82099915 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 570 >> BDC BT 1 0 0 -1 48.32099915 58.18599701 Tm [(device)1(抯)] TJ ET EMC /P <</MCID 571 >> BDC BT 1 0 0 -1 81.63600159 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 572 >> BDC BT 1 0 0 -1 84.13600159 58.18599701 Tm [(yield)] TJ ET EMC /P <</MCID 573 >> BDC BT 1 0 0 -1 104.1309967 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 574 >> BDC BT 1 0 0 -1 106.6309967 58.18599701 Tm [(and)] TJ ET EMC /P <</MCID 575 >> BDC BT 1 0 0 -1 121.06900024 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 576 >> BDC BT 1 0 0 -1 123.56900024 58.18599701 Tm [(relia)1(bility.)] TJ ET EMC /P <</MCID 577 >> BDC BT 1 0 0 -1 164.94599915 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 578 >> BDC BT 1 0 0 -1 167.44599915 58.18599701 Tm [(According)] TJ ET EMC /P <</MCID 579 >> BDC BT 1 0 0 -1 209.65299988 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 580 >> BDC BT 1 0 0 -1 212.15299988 58.18599701 Tm [(to)] TJ ET EMC /P <</MCID 581 >> BDC BT 1 0 0 -1 219.93099976 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 582 >> BDC BT 1 0 0 -1 0 73.78600311 Tm [(C.F.)] TJ ET EMC /P <</MCID 583 >> BDC BT 1 0 0 -1 17.2310009 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 584 >> BDC BT 1 0 0 -1 19.7310009 73.78600311 Tm [(Tsang)] TJ ET EMC /P <</MCID 585 >> BDC BT 1 0 0 -1 44.16899872 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 586 >> BDC BT 1 0 0 -1 46.66899872 73.78600311 Tm [(et)] TJ ET EMC /P <</MCID 587 >> BDC BT 1 0 0 -1 53.88600159 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 588 >> BDC BT 1 0 0 -1 56.38600159 73.78600311 Tm [(al,)] TJ ET EMC /P <</MCID 589 >> BDC BT 1 0 0 -1 66.10299683 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 590 >> BDC BT 1 0 0 -1 68.60299683 73.78600311 Tm [(there)] TJ ET EMC /P <</MCID 591 >> BDC BT 1 0 0 -1 88.58799744 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 592 >> BDC BT 1 0 0 -1 91.08799744 73.78600311 Tm [(are)] TJ ET EMC /P <</MCID 593 >> BDC BT 1 0 0 -1 103.29499817 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 594 >> BDC BT 1 0 0 -1 105.79499817 73.78600311 Tm [(three)] TJ ET EMC /P <</MCID 595 >> BDC BT 1 0 0 -1 125.77999878 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 596 >> BDC BT 1 0 0 -1 128.27999878 73.78600311 Tm [(main)] TJ ET EMC /P <</MCID 597 >> BDC BT 1 0 0 -1 148.2749939 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 598 >> BDC BT 1 0 0 -1 150.7749939 73.78600311 Tm [(wet)] TJ ET EMC /P <</MCID 599 >> BDC BT 1 0 0 -1 165.21299744 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 600 >> BDC BT 1 0 0 -1 167.71299744 73.78600311 Tm [(clea)1(n)] TJ ET EMC /P <</MCID 601 >> BDC BT 1 0 0 -1 188.80700684 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 602 >> BDC BT 1 0 0 -1 191.30700684 73.78600311 Tm [(processes)] TJ ET EMC /P <</MCID 603 >> BDC BT 1 0 0 -1 229.6269989 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 604 >> BDC BT 1 0 0 -1 0 89.38600159 Tm [(which)] TJ ET EMC /P <</MCID 605 >> BDC BT 1 0 0 -1 24.43799973 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 606 >> BDC BT 1 0 0 -1 26.93799973 89.38600159 Tm [(involve)] TJ ET EMC /P <</MCID 607 >> BDC BT 1 0 0 -1 56.93299866 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 608 >> BDC BT 1 0 0 -1 59.43299866 89.38600159 Tm [(the)] TJ ET EMC /P <</MCID 609 >> BDC BT 1 0 0 -1 71.65000153 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 610 >> BDC BT 1 0 0 -1 74.15000153 89.38600159 Tm [(dual)] TJ ET EMC /P <</MCID 611 >> BDC BT 1 0 0 -1 91.36699677 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 612 >> BDC BT 1 0 0 -1 93.86699677 89.38600159 Tm [(damasce)1(ne)] TJ ET EMC /P <</MCID 613 >> BDC BT 1 0 0 -1 137.72900391 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 614 >> BDC BT 1 0 0 -1 140.22900391 89.38600159 Tm [(structure)] TJ ET EMC /P <</MCID 615 >> BDC BT 1 0 0 -1 175.21400452 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 616 >> BDC BT 1 0 0 -1 177.71400452 89.38600159 Tm [(formati)1(on.)] TJ ET EMC /P <</MCID 617 >> BDC BT 1 0 0 -1 219.647995 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 618 >> BDC BT 1 0 0 -1 0 104.98600006 Tm [(These)] TJ ET EMC /P <</MCID 619 >> BDC BT 1 0 0 -1 23.87700081 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 620 >> BDC BT 1 0 0 -1 26.37700081 104.98600006 Tm [(steps)] TJ ET EMC /P <</MCID 621 >> BDC BT 1 0 0 -1 46.3769989 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 622 >> BDC BT 1 0 0 -1 48.8769989 104.98600006 Tm [(are)] TJ ET EMC /P <</MCID 623 >> BDC BT 1 0 0 -1 61.08399963 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 624 >> BDC BT 1 0 0 -1 63.58399963 104.98600006 Tm [(post-via)] TJ ET EMC /P <</MCID 625 >> BDC BT 1 0 0 -1 95.8010025 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 626 >> BDC BT 1 0 0 -1 98.3010025 104.98600006 Tm [(etch,)] TJ ET EMC /P <</MCID 627 >> BDC BT 1 0 0 -1 117.45600128 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 628 >> BDC BT 1 0 0 -1 119.95600128 104.98600006 Tm [(post-trench)] TJ ET EMC /P <</MCID 629 >> BDC BT 1 0 0 -1 164.94099426 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 630 >> BDC BT 1 0 0 -1 167.44099426 104.98600006 Tm [(etch,)] TJ ET EMC /P <</MCID 631 >> BDC BT 1 0 0 -1 186.59599304 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 632 >> BDC BT 1 0 0 -1 189.09599304 104.98600006 Tm [(and)] TJ ET EMC /P <</MCID 633 >> BDC BT 1 0 0 -1 203.53399658 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 634 >> BDC BT 1 0 0 -1 206.03399658 104.98600006 Tm [(post)] TJ ET EMC /P <</MCID 635 >> BDC BT 1 0 0 -1 222.70399475 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 636 >> BDC BT 1 0 0 -1 0 120.58599854 Tm [(Cu)] TJ ET EMC /P <</MCID 637 >> BDC BT 1 0 0 -1 11.67000008 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 638 >> BDC BT 1 0 0 -1 14.17000008 120.58599854 Tm [(cap)] TJ ET EMC /P <</MCID 639 >> BDC BT 1 0 0 -1 28.04700089 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 640 >> BDC BT 1 0 0 -1 30.54700089 120.58599854 Tm [(etch)] TJ ET EMC /P <</MCID 641 >> BDC BT 1 0 0 -1 47.20199966 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 642 >> BDC BT 1 0 0 -1 49.70199966 120.58599854 Tm [(respecti)1(vely)] TJ ET EMC /P <</MCID 643 >> BDC BT 1 0 0 -1 98.01300049 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 644 >> BDC BT 1 0 0 -1 100.51300049 120.58599854 Tm [([1])] TJ ET EMC /P <</MCID 645 >> BDC BT 1 0 0 -1 112.17299652 120.58599854 Tm [(.)] TJ ET EMC /P <</MCID 646 >> BDC BT 1 0 0 -1 114.67299652 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 647 >> BDC BT 1 0 0 -1 117.17299652 120.58599854 Tm [(By)] TJ ET EMC /P <</MCID 648 >> BDC BT 1 0 0 -1 128.84300232 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 649 >> BDC BT 1 0 0 -1 131.34300232 120.58599854 Tm [(undergoing)] TJ ET EMC /P <</MCID 650 >> BDC BT 1 0 0 -1 176.88999939 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 651 >> BDC BT 1 0 0 -1 179.38999939 120.58599854 Tm [(dry)] TJ ET EMC /P <</MCID 652 >> BDC BT 1 0 0 -1 192.72000122 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 653 >> BDC BT 1 0 0 -1 195.22000122 120.58599854 Tm [(etch,)] TJ ET EMC /P <</MCID 654 >> BDC BT 1 0 0 -1 214.375 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 655 >> BDC BT 1 0 0 -1 216.875 120.58599854 Tm [(the)] TJ ET EMC /P <</MCID 656 >> BDC BT 1 0 0 -1 229.09199524 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 657 >> BDC BT 1 0 0 -1 0 136.18600464 Tm [(by-products)] TJ ET EMC /P <</MCID 658 >> BDC BT 1 0 0 -1 47.76900101 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 659 >> BDC BT 1 0 0 -1 50.26900101 136.18600464 Tm [(such)] TJ ET EMC /P <</MCID 660 >> BDC BT 1 0 0 -1 68.59899902 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 661 >> BDC BT 1 0 0 -1 71.09899902 136.18600464 Tm [(as)] TJ ET EMC /P <</MCID 662 >> BDC BT 1 0 0 -1 79.42900085 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 663 >> BDC BT 1 0 0 -1 81.92900085 136.18600464 Tm [(CF)] TJ ET EMC /P <</MCID 664 >> BDC BT /FAAAEF 6.5 Tf 1 0 0 -1 94.16000366 137.68600464 Tm [(x)] TJ ET EMC /P <</MCID 665 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 97.04499817 136.18600464 Tm [(,)] TJ ET EMC /P <</MCID 666 >> BDC BT 1 0 0 -1 99.54499817 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 667 >> BDC BT 1 0 0 -1 102.04499817 136.18600464 Tm [(CuF)] TJ ET EMC /P <</MCID 668 >> BDC BT /FAAAEF 6.5 Tf 1 0 0 -1 119.27600098 137.68600464 Tm [(x)] TJ ET EMC /P <</MCID 669 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 122.16100311 136.18600464 Tm [(,)] TJ ET EMC /P <</MCID 670 >> BDC BT 1 0 0 -1 124.66100311 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 671 >> BDC BT 1 0 0 -1 127.16100311 136.18600464 Tm [(CuO,)] TJ ET EMC /P <</MCID 672 >> BDC BT 1 0 0 -1 148.55299377 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 673 >> BDC BT 1 0 0 -1 151.05299377 136.18600464 Tm [(Cu)] TJ ET EMC /P <</MCID 674 >> BDC BT /FAAAEF 6.5 Tf 1 0 0 -1 162.7230072 137.68600464 Tm [(x)] TJ ET EMC /P <</MCID 675 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 165.60800171 136.18600464 Tm [(O,)] TJ ET EMC /P <</MCID 676 >> BDC BT 1 0 0 -1 175.33000183 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 677 >> BDC BT 1 0 0 -1 177.83000183 136.18600464 Tm [(polymeri)1(c)] TJ ET EMC /P <</MCID 678 >> BDC BT 1 0 0 -1 218.37199402 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 679 >> BDC BT 1 0 0 -1 0 151.78599548 Tm [(residues)] TJ ET EMC /P <</MCID 680 >> BDC BT 1 0 0 -1 32.76900101 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 681 >> BDC BT 1 0 0 -1 35.26900101 151.78599548 Tm [(and)] TJ ET EMC /P <</MCID 682 >> BDC BT 1 0 0 -1 49.70700073 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 683 >> BDC BT 1 0 0 -1 52.20700073 151.78599548 Tm [(re-sputtere)1(d)] TJ ET EMC /P <</MCID 684 >> BDC BT 1 0 0 -1 99.96099854 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 685 >> BDC BT 1 0 0 -1 102.46099854 151.78599548 Tm [(Cu)] TJ ET EMC /P <</MCID 686 >> BDC BT 1 0 0 -1 114.1309967 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 687 >> BDC BT 1 0 0 -1 116.6309967 151.78599548 Tm [(are)] TJ ET EMC /P <</MCID 688 >> BDC BT 1 0 0 -1 128.83799744 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 689 >> BDC BT 1 0 0 -1 131.33799744 151.78599548 Tm [(formed)] TJ ET EMC /P <</MCID 690 >> BDC BT 1 0 0 -1 160.21499634 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 691 >> BDC BT 1 0 0 -1 162.71499634 151.78599548 Tm [([2])] TJ ET EMC /P <</MCID 692 >> BDC BT 1 0 0 -1 174.375 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 693 >> BDC BT 1 0 0 -1 176.875 151.78599548 Tm [([3])] TJ ET EMC /P <</MCID 694 >> BDC BT 1 0 0 -1 188.53500366 151.78599548 Tm [(.)] TJ ET EMC /P <</MCID 695 >> BDC BT 1 0 0 -1 191.03500366 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 696 >> BDC BT 1 0 0 -1 0 167.38600159 Tm [(Generall)1(y,)] TJ ET EMC /P <</MCID 697 >> BDC BT 1 0 0 -1 41.92399979 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 698 >> BDC BT 1 0 0 -1 44.42399979 167.38600159 Tm [(the)] TJ ET EMC /P <</MCID 699 >> BDC BT 1 0 0 -1 56.64099884 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 700 >> BDC BT 1 0 0 -1 59.14099884 167.38600159 Tm [(wafer抯)] TJ ET EMC /P <</MCID 701 >> BDC BT 1 0 0 -1 89.1210022 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 702 >> BDC BT 1 0 0 -1 91.6210022 167.38600159 Tm [(contam)1(ination)] TJ ET EMC /P <</MCID 703 >> BDC BT 1 0 0 -1 148.82800293 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 704 >> BDC BT 1 0 0 -1 151.32800293 167.38600159 Tm [(from)] TJ ET EMC /P <</MCID 705 >> BDC BT 1 0 0 -1 170.76600647 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 706 >> BDC BT 1 0 0 -1 173.26600647 167.38600159 Tm [(by-products)] TJ ET EMC /P <</MCID 707 >> BDC BT 1 0 0 -1 221.03500366 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 708 >> BDC BT 1 0 0 -1 223.53500366 167.38600159 Tm [(is)] TJ ET EMC /P <</MCID 709 >> BDC BT 1 0 0 -1 230.20500183 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 710 >> BDC BT 1 0 0 -1 0 182.98600769 Tm [(usually)] TJ ET EMC /P <</MCID 711 >> BDC BT 1 0 0 -1 28.88699913 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 712 >> BDC BT 1 0 0 -1 31.38699913 182.98600769 Tm [(inevit)1(able.)] TJ ET EMC /P <</MCID 713 >> BDC BT 1 0 0 -1 73.31600189 182.98600769 Tm /GS19 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 251.57499695 0 cm /P <</MCID 714 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC q 1 0 0 1 0 15.60000038 cm /P <</MCID 715 >> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS20 gs 0 g [(The)] TJ ET EMC /P <</MCID 716 >> BDC BT 1 0 0 -1 15.54699993 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 717 >> BDC BT 1 0 0 -1 18.04700089 11.38599968 Tm [(single-wafer)] TJ ET EMC /P <</MCID 718 >> BDC BT 1 0 0 -1 68.02300262 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 719 >> BDC BT 1 0 0 -1 70.52300262 11.38599968 Tm [(spin)] TJ ET EMC /P <</MCID 720 >> BDC BT 1 0 0 -1 87.19300079 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 721 >> BDC BT 1 0 0 -1 89.69300079 11.38599968 Tm [(clea)1(ning)] TJ ET EMC /P <</MCID 722 >> BDC BT 1 0 0 -1 123.56500244 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 723 >> BDC BT 1 0 0 -1 126.06500244 11.38599968 Tm [(tool)] TJ ET EMC /P <</MCID 724 >> BDC BT 1 0 0 -1 141.62199402 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 725 >> BDC BT 1 0 0 -1 144.12199402 11.38599968 Tm [(\(Ultra)] TJ ET EMC /P <</MCID 726 >> BDC BT 1 0 0 -1 167.99899292 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 727 >> BDC BT 1 0 0 -1 170.49899292 11.38599968 Tm [(C)] TJ ET EMC /P <</MCID 728 >> BDC BT 1 0 0 -1 177.16900635 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 729 >> BDC BT 1 0 0 -1 179.66900635 11.38599968 Tm [(II)] TJ ET EMC /P <</MCID 730 >> BDC BT 1 0 0 -1 186.32899475 11.38599968 Tm [(\))] TJ ET EMC /P <</MCID 731 >> BDC BT 1 0 0 -1 189.65899658 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 732 >> BDC BT 1 0 0 -1 192.15899658 11.38599968 Tm [(used)] TJ ET EMC /P <</MCID 733 >> BDC BT 1 0 0 -1 210.48899841 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 734 >> BDC BT 1 0 0 -1 212.98899841 11.38599968 Tm [(in)] TJ ET EMC /P <</MCID 735 >> BDC BT 1 0 0 -1 220.76699829 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 736 >> BDC BT 1 0 0 -1 0 26.98600006 Tm [(this)] TJ ET EMC /P <</MCID 737 >> BDC BT 1 0 0 -1 14.44799995 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 738 >> BDC BT 1 0 0 -1 16.94799995 26.98600006 Tm [(artic)1(le)] TJ ET EMC /P <</MCID 739 >> BDC BT 1 0 0 -1 41.9280014 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 740 >> BDC BT 1 0 0 -1 44.4280014 26.98600006 Tm [(is)] TJ ET EMC /P <</MCID 741 >> BDC BT 1 0 0 -1 51.09799957 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 742 >> BDC BT 1 0 0 -1 53.59799957 26.98600006 Tm [(made)] TJ ET EMC /P <</MCID 743 >> BDC BT 1 0 0 -1 75.25299835 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 744 >> BDC BT 1 0 0 -1 77.75299835 26.98600006 Tm [(by)] TJ ET EMC /P <</MCID 745 >> BDC BT 1 0 0 -1 87.75299835 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 746 >> BDC BT 1 0 0 -1 90.25299835 26.98600006 Tm [(ACM)] TJ ET EMC /P <</MCID 747 >> BDC BT 1 0 0 -1 113.03600311 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 748 >> BDC BT 1 0 0 -1 115.53600311 26.98600006 Tm [(Research,)] TJ ET EMC /P <</MCID 749 >> BDC BT 1 0 0 -1 154.68200684 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 750 >> BDC BT 1 0 0 -1 157.18200684 26.98600006 Tm [(Inc.)] TJ ET EMC /P <</MCID 751 >> BDC BT 1 0 0 -1 172.45100403 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 752 >> BDC BT 1 0 0 -1 174.95100403 26.98600006 Tm [(This)] TJ ET EMC /P <</MCID 753 >> BDC BT 1 0 0 -1 192.72900391 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 754 >> BDC BT 1 0 0 -1 195.22900391 26.98600006 Tm [(product)] TJ ET EMC /P <</MCID 755 >> BDC BT 1 0 0 -1 225.77600098 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 756 >> BDC BT 1 0 0 -1 0 42.58599854 Tm [(has)] TJ ET EMC /P <</MCID 757 >> BDC BT 1 0 0 -1 13.32999992 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 758 >> BDC BT 1 0 0 -1 15.82999992 42.58599854 Tm [(8)] TJ ET EMC /P <</MCID 759 >> BDC BT 1 0 0 -1 20.82999992 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 760 >> BDC BT 1 0 0 -1 23.32999992 42.58599854 Tm [(chambe)1(rs)] TJ ET EMC /P <</MCID 761 >> BDC BT 1 0 0 -1 61.64500046 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 762 >> BDC BT 1 0 0 -1 64.14499664 42.58599854 Tm [(and)] TJ ET EMC /P <</MCID 763 >> BDC BT 1 0 0 -1 78.58300018 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 764 >> BDC BT 1 0 0 -1 81.08300018 42.58599854 Tm [(each)] TJ ET EMC /P <</MCID 765 >> BDC BT 1 0 0 -1 99.39800262 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 766 >> BDC BT 1 0 0 -1 101.89800262 42.58599854 Tm [(chambe)1(r)] TJ ET EMC /P <</MCID 767 >> BDC BT 1 0 0 -1 136.32200623 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 768 >> BDC BT 1 0 0 -1 138.82200623 42.58599854 Tm [(is)] TJ ET EMC /P <</MCID 769 >> BDC BT 1 0 0 -1 145.49200439 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 770 >> BDC BT 1 0 0 -1 147.99200439 42.58599854 Tm [(configured)] TJ ET EMC /P <</MCID 771 >> BDC BT 1 0 0 -1 191.30700684 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 772 >> BDC BT 1 0 0 -1 193.80700684 42.58599854 Tm [(with)] TJ ET EMC /P <</MCID 773 >> BDC BT 1 0 0 -1 211.58500671 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 774 >> BDC BT 1 0 0 -1 0 58.18599701 Tm [(four)] TJ ET EMC /P <</MCID 775 >> BDC BT 1 0 0 -1 16.65999985 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 776 >> BDC BT 1 0 0 -1 19.15999985 58.18599701 Tm [(chemi)1(cals)] TJ ET EMC /P <</MCID 777 >> BDC BT 1 0 0 -1 59.13999939 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 778 >> BDC BT 1 0 0 -1 61.63999939 58.18599701 Tm [(-)] TJ ET EMC /P <</MCID 779 >> BDC BT 1 0 0 -1 64.97000122 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 780 >> BDC BT 1 0 0 -1 67.47000122 58.18599701 Tm [(Main)] TJ ET EMC /P <</MCID 781 >> BDC BT 1 0 0 -1 88.57800293 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 782 >> BDC BT 1 0 0 -1 91.07800293 58.18599701 Tm [(chemi)1(cal)] TJ ET EMC /P <</MCID 783 >> BDC BT 1 0 0 -1 127.16699982 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 784 >> BDC BT 1 0 0 -1 129.66700745 58.18599701 Tm [(\(ST250)] TJ ET EMC /P <</MCID 785 >> BDC BT 1 0 0 -1 159.66700745 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 786 >> BDC BT 1 0 0 -1 162.16700745 58.18599701 Tm [(or)] TJ ET EMC /P <</MCID 787 >> BDC BT 1 0 0 -1 170.49699402 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 788 >> BDC BT 1 0 0 -1 172.99699402 58.18599701 Tm [(ICS8000\),)] TJ ET EMC /P <</MCID 789 >> BDC BT 1 0 0 -1 214.38900757 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 790 >> BDC BT 1 0 0 -1 0 73.78600311 Tm [(DHF,)] TJ ET EMC /P <</MCID 791 >> BDC BT 1 0 0 -1 22.50499916 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 792 >> BDC BT 1 0 0 -1 25.00499916 73.78600311 Tm [(dual)] TJ ET EMC /P <</MCID 793 >> BDC BT 1 0 0 -1 42.22200012 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 794 >> BDC BT 1 0 0 -1 44.72200012 73.78600311 Tm [(fluid)] TJ ET EMC /P <</MCID 795 >> BDC BT 1 0 0 -1 63.60900116 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 796 >> BDC BT 1 0 0 -1 66.10900116 73.78600311 Tm [(spray)] TJ ET EMC /P <</MCID 797 >> BDC BT 1 0 0 -1 87.76899719 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 798 >> BDC BT 1 0 0 -1 90.26899719 73.78600311 Tm [(and)] TJ ET EMC /P <</MCID 799 >> BDC BT 1 0 0 -1 104.70700073 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 800 >> BDC BT 1 0 0 -1 107.20700073 73.78600311 Tm [(CO)] TJ ET EMC /P <</MCID 801 >> BDC BT /FAAABG 6.5 Tf 1 0 0 -1 121.09899902 75.28600311 Tm [(2)] TJ ET EMC /P <</MCID 802 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 124.34899902 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 803 >> BDC BT 1 0 0 -1 126.84899902 73.78600311 Tm [(gasified)] TJ ET EMC /P <</MCID 804 >> BDC BT 1 0 0 -1 158.5039978 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 805 >> BDC BT 1 0 0 -1 161.0039978 73.78600311 Tm [(DI)] TJ ET EMC /P <</MCID 806 >> BDC BT 1 0 0 -1 171.55599976 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 807 >> BDC BT 1 0 0 -1 174.05599976 73.78600311 Tm [(water.)] TJ ET EMC /P <</MCID 808 >> BDC BT 1 0 0 -1 198.76300049 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 809 >> BDC BT 1 0 0 -1 201.26300049 73.78600311 Tm [(Two)] TJ ET EMC /P <</MCID 810 >> BDC BT 1 0 0 -1 219.59300232 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 811 >> BDC BT 1 0 0 -1 0 89.38600159 Tm [(kinds)] TJ ET EMC /P <</MCID 812 >> BDC BT 1 0 0 -1 21.67000008 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 813 >> BDC BT 1 0 0 -1 24.17000008 89.38600159 Tm [(of)] TJ ET EMC /P <</MCID 814 >> BDC BT 1 0 0 -1 32.5 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 815 >> BDC BT 1 0 0 -1 35 89.38600159 Tm [(post-etch)] TJ ET EMC /P <</MCID 816 >> BDC BT 1 0 0 -1 71.65499878 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 817 >> BDC BT 1 0 0 -1 74.15499878 89.38600159 Tm [(clea)1(n)] TJ ET EMC /P <</MCID 818 >> BDC BT 1 0 0 -1 95.24900055 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 819 >> BDC BT 1 0 0 -1 97.74900055 89.38600159 Tm [(chemi)1(cals)] TJ ET EMC /P <</MCID 820 >> BDC BT 1 0 0 -1 137.72900391 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 821 >> BDC BT 1 0 0 -1 140.22900391 89.38600159 Tm [(\(ST250)] TJ ET EMC /P <</MCID 822 >> BDC BT 1 0 0 -1 170.22900391 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 823 >> BDC BT 1 0 0 -1 172.72900391 89.38600159 Tm [(and)] TJ ET EMC /P <</MCID 824 >> BDC BT 1 0 0 -1 187.16700745 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 825 >> BDC BT 1 0 0 -1 189.66700745 89.38600159 Tm [(ICS8000\))] TJ ET EMC /P <</MCID 826 >> BDC BT 1 0 0 -1 228.55900574 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 827 >> BDC BT 1 0 0 -1 0 104.98600006 Tm [(are)] TJ ET EMC /P <</MCID 828 >> BDC BT 1 0 0 -1 12.20699978 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 829 >> BDC BT 1 0 0 -1 14.70699978 104.98600006 Tm [(tested)] TJ ET EMC /P <</MCID 830 >> BDC BT 1 0 0 -1 38.0320015 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 831 >> BDC BT 1 0 0 -1 40.5320015 104.98600006 Tm [(and)] TJ ET EMC /P <</MCID 832 >> BDC BT 1 0 0 -1 54.97000122 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 833 >> BDC BT 1 0 0 -1 57.47000122 104.98600006 Tm [(discussed)] TJ ET EMC /P <</MCID 834 >> BDC BT 1 0 0 -1 95.80000305 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 835 >> BDC BT 1 0 0 -1 98.30000305 104.98600006 Tm [(in)] TJ ET EMC /P <</MCID 836 >> BDC BT 1 0 0 -1 106.07800293 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 837 >> BDC BT 1 0 0 -1 108.57800293 104.98600006 Tm [(this)] TJ ET EMC /P <</MCID 838 >> BDC BT 1 0 0 -1 123.02600098 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 839 >> BDC BT 1 0 0 -1 125.52600098 104.98600006 Tm [(artic)1(le.)] TJ ET EMC /P <</MCID 840 >> BDC BT 1 0 0 -1 153.0059967 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 841 >> BDC BT 1 0 0 -1 155.5059967 104.98600006 Tm [(Both)] TJ ET EMC /P <</MCID 842 >> BDC BT 1 0 0 -1 174.95399475 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 843 >> BDC BT 1 0 0 -1 177.45399475 104.98600006 Tm [(ST250)] TJ ET EMC /P <</MCID 844 >> BDC BT 1 0 0 -1 204.12399292 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 845 >> BDC BT 1 0 0 -1 206.62399292 104.98600006 Tm [(and)] TJ ET EMC /P <</MCID 846 >> BDC BT 1 0 0 -1 221.06199646 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 847 >> BDC BT 1 0 0 -1 0 120.58599854 Tm [(ICS8000)] TJ ET EMC /P <</MCID 848 >> BDC BT 1 0 0 -1 35.56200027 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 849 >> BDC BT 1 0 0 -1 38.06200027 120.58599854 Tm [(are)] TJ ET EMC /P <</MCID 850 >> BDC BT 1 0 0 -1 50.26900101 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 851 >> BDC BT 1 0 0 -1 52.76900101 120.58599854 Tm [(fluorine-ba)1(s)-1(e)1(d)] TJ ET EMC /P <</MCID 852 >> BDC BT 1 0 0 -1 110.52300262 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 853 >> BDC BT 1 0 0 -1 113.02300262 120.58599854 Tm [(semi-aque)1(ous)] TJ ET EMC /P <</MCID 854 >> BDC BT 1 0 0 -1 168.00799561 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 855 >> BDC BT 1 0 0 -1 170.50799561 120.58599854 Tm [(strippers)] TJ ET EMC /P <</MCID 856 >> BDC BT 1 0 0 -1 204.94599915 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 857 >> BDC BT 1 0 0 -1 207.44599915 120.58599854 Tm [(and)] TJ ET EMC /P <</MCID 858 >> BDC BT 1 0 0 -1 221.88400269 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 859 >> BDC BT 1 0 0 -1 0 136.18600464 Tm [(designed)] TJ ET EMC /P <</MCID 860 >> BDC BT 1 0 0 -1 35.54700089 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 861 >> BDC BT 1 0 0 -1 38.04700089 136.18600464 Tm [(for)] TJ ET EMC /P <</MCID 862 >> BDC BT 1 0 0 -1 49.70700073 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 863 >> BDC BT 1 0 0 -1 52.20700073 136.18600464 Tm [(Cu)] TJ ET EMC /P <</MCID 864 >> BDC BT 1 0 0 -1 63.8769989 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 865 >> BDC BT 1 0 0 -1 66.3769989 136.18600464 Tm [(damasce)1(ne)] TJ ET EMC /P <</MCID 866 >> BDC BT 1 0 0 -1 110.23899841 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 867 >> BDC BT 1 0 0 -1 112.73899841 136.18600464 Tm [(clea)1(ning.)] TJ ET EMC /P <</MCID 868 >> BDC BT 1 0 0 -1 149.11099243 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 869 >> BDC BT 1 0 0 -1 151.61099243 136.18600464 Tm [(However,)] TJ ET EMC /P <</MCID 870 >> BDC BT 1 0 0 -1 190.76100159 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 871 >> BDC BT 1 0 0 -1 193.26100159 136.18600464 Tm [(as)] TJ ET EMC /P <</MCID 872 >> BDC BT 1 0 0 -1 201.59100342 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 873 >> BDC BT 1 0 0 -1 204.09100342 136.18600464 Tm [(shown)] TJ ET EMC /P <</MCID 874 >> BDC BT 1 0 0 -1 230.20399475 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 875 >> BDC BT 1 0 0 -1 0 151.78599548 Tm [(in)] TJ ET EMC /P <</MCID 876 >> BDC BT 1 0 0 -1 7.77799988 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 877 >> BDC BT 1 0 0 -1 10.27799988 151.78599548 Tm [(Table)] TJ ET EMC /P <</MCID 878 >> BDC BT 1 0 0 -1 33.04199982 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 879 >> BDC BT 1 0 0 -1 35.54199982 151.78599548 Tm [(1,)] TJ ET EMC /P <</MCID 880 >> BDC BT 1 0 0 -1 43.04199982 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 881 >> BDC BT 1 0 0 -1 45.54199982 151.78599548 Tm [(ICS8000)] TJ ET EMC /P <</MCID 882 >> BDC BT 1 0 0 -1 81.10399628 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 883 >> BDC BT 1 0 0 -1 83.60399628 151.78599548 Tm [(feature)1(s)] TJ ET EMC /P <</MCID 884 >> BDC BT 1 0 0 -1 115.25 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 885 >> BDC BT 1 0 0 -1 117.75 151.78599548 Tm [(lower)] TJ ET EMC /P <</MCID 886 >> BDC BT 1 0 0 -1 140.51899719 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 887 >> BDC BT 1 0 0 -1 143.01899719 151.78599548 Tm [(viscosity)] TJ ET EMC /P <</MCID 888 >> BDC BT 1 0 0 -1 178.57600403 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 889 >> BDC BT 1 0 0 -1 181.07600403 151.78599548 Tm [(compare)1(d)] TJ ET EMC /P <</MCID 890 >> BDC BT 1 0 0 -1 220.5 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 891 >> BDC BT 1 0 0 -1 0 167.47200012 Tm [(with)] TJ ET EMC /P <</MCID 892 >> BDC BT 1 0 0 -1 17.77799988 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 893 >> BDC BT 1 0 0 -1 20.27799988 167.47200012 Tm [(ST250)] TJ ET EMC /P <</MCID 894 >> BDC BT 1 0 0 -1 46.94800186 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 895 >> BDC BT 1 0 0 -1 49.44800186 167.47200012 Tm [(both)] TJ ET EMC /P <</MCID 896 >> BDC BT 1 0 0 -1 67.22599792 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 897 >> BDC BT 1 0 0 -1 69.72599792 167.47200012 Tm [(at)] TJ ET EMC /P <</MCID 898 >> BDC BT 1 0 0 -1 76.94300079 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 899 >> BDC BT 1 0 0 -1 79.44300079 167.47200012 Tm [(room)] TJ ET EMC /P <</MCID 900 >> BDC BT 1 0 0 -1 100.5510025 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 901 >> BDC BT 1 0 0 -1 103.0510025 167.47200012 Tm [(tempe)1(rature)] TJ ET EMC /P <</MCID 902 >> BDC BT 1 0 0 -1 150.80000305 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 903 >> BDC BT 1 0 0 -1 153.30000305 167.47200012 Tm [(and)] TJ ET EMC /P <</MCID 904 >> BDC BT 1 0 0 -1 167.73800659 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 905 >> BDC BT 1 0 0 -1 170.23800659 167.47200012 Tm [(40)] TJ ET EMC /P <</Lang (zh-CN) /MCID 906 >> BDC BT /FAAAFA 10 Tf 1 0 0 -1 180.23800659 167.47200012 Tm [<0003>] TJ ET EMC /P <</MCID 907 >> BDC BT /FAAAFE 10 Tf 1 0 0 -1 190.23800659 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 908 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 195.23800659 167.47200012 Tm [(which)] TJ ET EMC /P <</MCID 909 >> BDC BT 1 0 0 -1 219.67599487 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 910 >> BDC BT 1 0 0 -1 222.17599487 167.47200012 Tm [(is)] TJ ET EMC /P <</MCID 911 >> BDC BT 1 0 0 -1 228.84599304 167.47200012 Tm [( )] TJ ET EMC /P <</MCID 912 >> BDC BT 1 0 0 -1 0 182.98600769 Tm [(the)] TJ ET EMC /P <</MCID 913 >> BDC BT 1 0 0 -1 12.21700001 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 914 >> BDC BT 1 0 0 -1 14.71700001 182.98600769 Tm [(typica)1(l)] TJ ET EMC /P <</MCID 915 >> BDC BT 1 0 0 -1 41.92900085 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 916 >> BDC BT 1 0 0 -1 44.42900085 182.98600769 Tm [(process)] TJ ET EMC /P <</MCID 917 >> BDC BT 1 0 0 -1 74.41899872 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 918 >> BDC BT 1 0 0 -1 76.91899872 182.98600769 Tm [(tempe)1(rature.)] TJ ET EMC /P <</MCID 919 >> BDC BT 1 0 0 -1 127.16799927 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 920 >> BDC BT 1 0 0 -1 129.66799927 182.98600769 Tm [(It)] TJ ET EMC /P <</MCID 921 >> BDC BT 1 0 0 -1 135.77600098 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 922 >> BDC BT 1 0 0 -1 138.27600098 182.98600769 Tm [(is)] TJ ET EMC /P <</MCID 923 >> BDC BT 1 0 0 -1 144.94599915 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 924 >> BDC BT 1 0 0 -1 147.44599915 182.98600769 Tm [(expect)1(ed)] TJ ET EMC /P <</MCID 925 >> BDC BT 1 0 0 -1 182.97799683 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 926 >> BDC BT 1 0 0 -1 185.47799683 182.98600769 Tm [(that)] TJ ET EMC /P <</MCID 927 >> BDC BT 1 0 0 -1 200.4730072 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 928 >> BDC BT 1 0 0 -1 0 198.58599854 Tm [(ICS8000)] TJ ET EMC /P <</MCID 929 >> BDC BT 1 0 0 -1 35.56200027 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 930 >> BDC BT 1 0 0 -1 38.06200027 198.58599854 Tm [(can)] TJ ET EMC /P <</MCID 931 >> BDC BT 1 0 0 -1 51.93899918 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 932 >> BDC BT 1 0 0 -1 54.43899918 198.58599854 Tm [(be)] TJ ET EMC /P <</MCID 933 >> BDC BT 1 0 0 -1 63.8769989 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 934 >> BDC BT 1 0 0 -1 66.3769989 198.58599854 Tm [(rinsed)] TJ ET EMC /P <</MCID 935 >> BDC BT 1 0 0 -1 90.81500244 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 936 >> BDC BT 1 0 0 -1 93.31500244 198.58599854 Tm [(off)] TJ ET EMC /P <</MCID 937 >> BDC BT 1 0 0 -1 104.97499847 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 938 >> BDC BT 1 0 0 -1 107.47499847 198.58599854 Tm [(by)] TJ ET EMC /P <</MCID 939 >> BDC BT 1 0 0 -1 117.47499847 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 940 >> BDC BT 1 0 0 -1 119.97499847 198.58599854 Tm [(ultrapure)] TJ ET EMC /P <</MCID 941 >> BDC BT 1 0 0 -1 156.06900024 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 942 >> BDC BT 1 0 0 -1 158.56900024 198.58599854 Tm [(water)] TJ ET EMC /P <</MCID 943 >> BDC BT 1 0 0 -1 180.77600098 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 944 >> BDC BT 1 0 0 -1 183.27600098 198.58599854 Tm [(more)] TJ ET EMC /P <</MCID 945 >> BDC BT 1 0 0 -1 203.82299805 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 946 >> BDC BT 1 0 0 -1 0 214.18600464 Tm [(effici)1(ently)] TJ ET EMC /P <</MCID 947 >> BDC BT 1 0 0 -1 41.0890007 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 948 >> BDC BT 1 0 0 -1 43.5890007 214.18600464 Tm [(compare)1(d)] TJ ET EMC /P <</MCID 949 >> BDC BT 1 0 0 -1 83.01300049 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 950 >> BDC BT 1 0 0 -1 85.51300049 214.18600464 Tm [(with)] TJ ET EMC /P <</MCID 951 >> BDC BT 1 0 0 -1 103.29100037 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 952 >> BDC BT 1 0 0 -1 105.79100037 214.18600464 Tm [(the)] TJ ET EMC /P <</MCID 953 >> BDC BT 1 0 0 -1 118.00800323 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 954 >> BDC BT 1 0 0 -1 120.50800323 214.18600464 Tm [(viscous)] TJ ET EMC /P <</MCID 955 >> BDC BT 1 0 0 -1 150.50799561 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 956 >> BDC BT 1 0 0 -1 153.00799561 214.18600464 Tm [(ST250,)] TJ ET EMC /P <</MCID 957 >> BDC BT 1 0 0 -1 182.17799377 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 958 >> BDC BT 1 0 0 -1 184.67799377 214.18600464 Tm [(which)] TJ ET EMC /P <</MCID 959 >> BDC BT 1 0 0 -1 209.11599731 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 960 >> BDC BT 1 0 0 -1 211.61599731 214.18600464 Tm [(may)] TJ ET EMC /P <</MCID 961 >> BDC BT 1 0 0 -1 228.83299255 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 962 >> BDC BT 1 0 0 -1 0 229.78599548 Tm [(contribut)1(e)] TJ ET EMC /P <</MCID 963 >> BDC BT 1 0 0 -1 40.54199982 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 964 >> BDC BT 1 0 0 -1 43.04199982 229.78599548 Tm [(to)] TJ ET EMC /P <</MCID 965 >> BDC BT 1 0 0 -1 50.81999969 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 966 >> BDC BT 1 0 0 -1 53.31999969 229.78599548 Tm [(shorter)] TJ ET EMC /P <</MCID 967 >> BDC BT 1 0 0 -1 81.08899689 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 968 >> BDC BT 1 0 0 -1 83.58899689 229.78599548 Tm [(rinse)] TJ ET EMC /P <</MCID 969 >> BDC BT 1 0 0 -1 103.02700043 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 970 >> BDC BT 1 0 0 -1 105.52700043 229.78599548 Tm [(tim)1(e)] TJ ET EMC /P <</MCID 971 >> BDC BT 1 0 0 -1 123.30000305 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 972 >> BDC BT 1 0 0 -1 125.80000305 229.78599548 Tm [(and)] TJ ET EMC /P <</MCID 973 >> BDC BT 1 0 0 -1 140.23800659 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 974 >> BDC BT 1 0 0 -1 142.73800659 229.78599548 Tm [(bette)1(r)] TJ ET EMC /P <</MCID 975 >> BDC BT 1 0 0 -1 165.5019989 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 976 >> BDC BT 1 0 0 -1 168.0019989 229.78599548 Tm [(partic)1(le)] TJ ET EMC /P <</MCID 977 >> BDC BT 1 0 0 -1 197.98199463 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 978 >> BDC BT 1 0 0 -1 0 245.38600159 Tm [(performanc)1(e.)] TJ ET EMC /P <</MCID 979 >> BDC BT 1 0 0 -1 53.02199936 245.38600159 Tm /GS21 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 0 265.20001221 cm /P <</MCID 980 >> BDC BT 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 280.79998779 cm /P <</MCID 981 >> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS22 gs 0 g [(Table)] TJ ET EMC /P <</MCID 982 >> BDC BT 1 0 0 -1 22.76399994 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 983 >> BDC BT 1 0 0 -1 29.63100052 11.38599968 Tm [(1.)] TJ ET EMC /P <</MCID 984 >> BDC BT 1 0 0 -1 37.13100052 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 985 >> BDC BT 1 0 0 -1 43.9980011 11.38599968 Tm [(Viscosity)] TJ ET EMC /P <</MCID 986 >> BDC BT 1 0 0 -1 81.77600098 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 987 >> BDC BT 1 0 0 -1 88.64299774 11.38599968 Tm [(compari)1(s)-1(on)] TJ ET EMC /P <</MCID 988 >> BDC BT 1 0 0 -1 135.29800415 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 989 >> BDC BT 1 0 0 -1 142.16499329 11.38599968 Tm [(between)] TJ ET EMC /P <</MCID 990 >> BDC BT 1 0 0 -1 175.47999573 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 991 >> BDC BT 1 0 0 -1 182.34700012 11.38599968 Tm [(ST250)] TJ ET EMC /P <</MCID 992 >> BDC BT 1 0 0 -1 209.01699829 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 993 >> BDC BT 1 0 0 -1 215.88400269 11.38599968 Tm [(and)] TJ ET EMC /P <</MCID 994 >> BDC BT 1 0 0 -1 230.32200623 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 995 >> BDC BT 1 0 0 -1 0 26.98600006 Tm [(ICS8000)] TJ ET EMC /P <</MCID 996 >> BDC BT 1 0 0 -1 35.56200027 26.98600006 Tm /GS23 gs 0 g [( )] TJ ET EMC Q q 1 0 0 1 -2.38700008 312 cm q -1 0 m 128.55000305 0 l 128.55000305 17.60000038 l -1 17.60000038 l h W n q 1 0 0 1 5.4000001 1 cm /P <</MCID 997 >> BDC BT 1 0 0 -1 58.375 11.38599968 Tm [( )] TJ ET EMC Q Q q 1 0 0 1 127.55000305 0 cm -1 0 m 50.59999847 0 l 50.59999847 17.60000038 l -1 17.60000038 l h W n q 1 0 0 1 5.4000001 1 cm /P <</MCID 998 >> BDC BT /FAAAAH 10 Tf 1 0 0 -1 5.78399992 11.38599968 Tm /GS24 gs 0 g [(ST250)] TJ ET EMC /P <</MCID 999 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 33.01499939 11.38599968 Tm /GS25 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 177.1499939 0 cm -1 0 m 58.95000076 0 l 58.95000076 17.60000038 l -1 17.60000038 l h W n q 1 0 0 1 5.4000001 1 cm /P <</MCID 1000 >> BDC BT /FAAAAH 10 Tf 1 0 0 -1 5.23699999 11.38599968 Tm /GS26 gs 0 g [(ICS8000)] TJ ET EMC /P <</MCID 1001 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 41.91199875 11.38599968 Tm /GS27 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 0 16.60000038 cm q -1 -1 m 128.55000305 -1 l 128.55000305 19 l -1 19 l h W n q 1 0 0 1 5.4000001 1 cm /P <</MCID 1002 >> BDC BT /FAAAAH 10 Tf 1 0 0 -1 3.34699988 11.47200012 Tm /GS28 gs 0 g [(Viscosity)] TJ ET EMC /P <</MCID 1003 >> BDC BT 1 0 0 -1 41.67699814 11.47200012 Tm [( )] TJ ET EMC /P <</MCID 1004 >> BDC BT 1 0 0 -1 44.17699814 11.47200012 Tm [(at)] TJ ET EMC /P <</MCID 1005 >> BDC BT 1 0 0 -1 52.50699997 11.47200012 Tm [( )] TJ ET EMC /P <</MCID 1006 >> BDC BT 1 0 0 -1 55.00699997 11.47200012 Tm [(25)] TJ ET EMC /P <</Lang (zh-CN) /MCID 1007 >> BDC BT /FAAAGE 10 Tf 1 0 0 -1 65.00700378 11.47200012 Tm 2 Tr 0.2857143 w 0 G [<0003>] TJ ET EMC /P <</MCID 1008 >> BDC BT /FAAAAH 10 Tf 1 0 0 -1 75.07700348 11.47200012 Tm 0 Tr [( )] TJ ET EMC /P <</MCID 1009 >> BDC BT 1 0 0 -1 80.07700348 11.47200012 Tm [(\(mPa)] TJ ET EMC /P <</Lang (zh-CN) /MCID 1010 >> BDC BT 1 0 0 -1 102.84600067 11.47200012 Tm [(?] TJ ET EMC /P <</MCID 1011 >> BDC BT 1 0 0 -1 106.18099976 11.47200012 Tm [(s\))] TJ ET EMC /P <</MCID 1012 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 113.40299988 11.47200012 Tm /GS29 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 127.55000305 0 cm -1 -1 m 50.59999847 -1 l 50.59999847 19 l -1 19 l h W n q 1 0 0 1 5.4000001 1 cm /P <</MCID 1013 >> BDC BT 1 0 0 -1 8.14999962 12.08599949 Tm /GS30 gs 0 g [(33.14)] TJ ET EMC /P <</MCID 1014 >> BDC BT 1 0 0 -1 30.64999962 12.08599949 Tm /GS31 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 177.1499939 0 cm -1 -1 m 58.95000076 -1 l 58.95000076 19 l -1 19 l h W n q 1 0 0 1 5.4000001 1 cm /P <</MCID 1015 >> BDC BT 1 0 0 -1 14.82499981 12.08599949 Tm /GS32 gs 0 g [(8.75)] TJ ET EMC /P <</MCID 1016 >> BDC BT 1 0 0 -1 32.32500076 12.08599949 Tm /GS33 gs 0 g [( )] TJ ET EMC Q Q Q q 1 0 0 1 0 34.59999847 cm q -1 -1 m 128.55000305 -1 l 128.55000305 16.60000038 l -1 16.60000038 l h W n q 1 0 0 1 5.4000001 0 cm /P <</MCID 1017 >> BDC BT /FAAAAH 10 Tf 1 0 0 -1 3.34699988 11.47200012 Tm /GS34 gs 0 g [(Viscosity)] TJ ET EMC /P <</MCID 1018 >> BDC BT 1 0 0 -1 41.67699814 11.47200012 Tm [( )] TJ ET EMC /P <</MCID 1019 >> BDC BT 1 0 0 -1 44.17699814 11.47200012 Tm [(at)] TJ ET EMC /P <</MCID 1020 >> BDC BT 1 0 0 -1 52.50699997 11.47200012 Tm [( )] TJ ET EMC /P <</MCID 1021 >> BDC BT 1 0 0 -1 55.00699997 11.47200012 Tm [(40)] TJ ET EMC /P <</Lang (zh-CN) /MCID 1022 >> BDC BT /FAAAGE 10 Tf 1 0 0 -1 65.00700378 11.47200012 Tm 2 Tr 0.2857143 w 0 G [<0003>] TJ ET EMC /P <</MCID 1023 >> BDC BT /FAAAAH 10 Tf 1 0 0 -1 75.07700348 11.47200012 Tm 0 Tr [( )] TJ ET EMC /P <</MCID 1024 >> BDC BT 1 0 0 -1 80.07700348 11.47200012 Tm [(\(mPa)] TJ ET EMC /P <</Lang (zh-CN) /MCID 1025 >> BDC BT 1 0 0 -1 102.84600067 11.47200012 Tm [(?] TJ ET EMC /P <</MCID 1026 >> BDC BT 1 0 0 -1 106.18099976 11.47200012 Tm [(s\))] TJ ET EMC /P <</MCID 1027 >> BDC BT /FAAABG 10 Tf 1 0 0 -1 113.40299988 11.47200012 Tm /GS35 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 127.55000305 0 cm -1 -1 m 50.59999847 -1 l 50.59999847 16.60000038 l -1 16.60000038 l h W n q 1 0 0 1 5.4000001 0 cm /P <</MCID 1028 >> BDC BT 1 0 0 -1 8.14999962 11.38599968 Tm /GS36 gs 0 g [(17.25)] TJ ET EMC /P <</MCID 1029 >> BDC BT 1 0 0 -1 30.64999962 11.38599968 Tm /GS37 gs 0 g [( )] TJ ET EMC Q Q q 1 0 0 1 177.1499939 0 cm -1 -1 m 58.95000076 -1 l 58.95000076 16.60000038 l -1 16.60000038 l h W n q 1 0 0 1 5.4000001 0 cm /P <</MCID 1030 >> BDC BT 1 0 0 -1 14.82499981 11.38599968 Tm /GS38 gs 0 g [(5.70)] TJ ET EMC /P <</MCID 1031 >> BDC BT 1 0 0 -1 32.32500076 11.38599968 Tm /GS39 gs 0 g [( )] TJ ET EMC Q Q Q q /GS40 gs 0 G 0 0.5 m 235.09999084 0.5 l S Q q /GS41 gs 0 G 0 17.10000038 m 235.09999084 17.10000038 l S Q q /GS42 gs 0 G 0 50.69999695 m 235.09999084 50.69999695 l S Q Q q 1 0 0 1 0 363.20001221 cm /P <</MCID 1032 >> BDC BT 1 0 0 -1 0 11.38599968 Tm [( )] TJ ET EMC Q q 1 0 0 1 0 378.79998779 cm /P <</MCID 1033 >> BDC BT 1 0 0 -1 0 11.38599968 Tm /GS43 gs 0 g [(In)] TJ ET EMC /P <</MCID 1034 >> BDC BT 1 0 0 -1 8.32999992 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1035 >> BDC BT 1 0 0 -1 10.94200039 11.38599968 Tm [(a)] TJ ET EMC /P <</MCID 1036 >> BDC BT 1 0 0 -1 15.38000011 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1037 >> BDC BT 1 0 0 -1 17.99200058 11.38599968 Tm [(volume)] TJ ET EMC /P <</MCID 1038 >> BDC BT 1 0 0 -1 47.98699951 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1039 >> BDC BT 1 0 0 -1 50.59899902 11.38599968 Tm [(manufac)1(turing)] TJ ET EMC /P <</MCID 1040 >> BDC BT 1 0 0 -1 108.91000366 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1041 >> BDC BT 1 0 0 -1 111.52200317 11.38599968 Tm [(environme)1(nt,)] TJ ET EMC /P <</MCID 1042 >> BDC BT 1 0 0 -1 164.56399536 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1043 >> BDC BT 1 0 0 -1 167.17599487 11.38599968 Tm [(concerni)1(ng)] TJ ET EMC /P <</MCID 1044 >> BDC BT 1 0 0 -1 211.6000061 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1045 >> BDC BT 1 0 0 -1 214.21200562 11.38599968 Tm [(cost)] TJ ET EMC /P <</MCID 1046 >> BDC BT 1 0 0 -1 230.32000732 11.38599968 Tm [( )] TJ ET EMC /P <</MCID 1047 >> BDC BT 1 0 0 -1 0 26.98600006 Tm [(of)] TJ ET EMC /P <</MCID 1048 >> BDC BT 1 0 0 -1 8.32999992 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1049 >> BDC BT 1 0 0 -1 11.04500008 26.98600006 Tm [(consumption)] TJ ET EMC /P <</MCID 1050 >> BDC BT 1 0 0 -1 62.70999908 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1051 >> BDC BT 1 0 0 -1 65.42500305 26.98600006 Tm [(\(CoC\),)] TJ ET EMC /P <</MCID 1052 >> BDC BT 1 0 0 -1 92.92500305 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1053 >> BDC BT 1 0 0 -1 95.63999939 26.98600006 Tm [(both)] TJ ET EMC /P <</MCID 1054 >> BDC BT 1 0 0 -1 113.41799927 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1055 >> BDC BT 1 0 0 -1 116.13300323 26.98600006 Tm [(ST250)] TJ ET EMC /P <</MCID 1056 >> BDC BT 1 0 0 -1 142.80299377 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1057 >> BDC BT 1 0 0 -1 145.51800537 26.98600006 Tm [(and)] TJ ET EMC /P <</MCID 1058 >> BDC BT 1 0 0 -1 159.95599365 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1059 >> BDC BT 1 0 0 -1 162.67100525 26.98600006 Tm [(ICS8000)] TJ ET EMC /P <</MCID 1060 >> BDC BT 1 0 0 -1 198.23300171 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1061 >> BDC BT 1 0 0 -1 200.94799805 26.98600006 Tm [(need)] TJ ET EMC /P <</MCID 1062 >> BDC BT 1 0 0 -1 219.82499695 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1063 >> BDC BT 1 0 0 -1 222.53999329 26.98600006 Tm [(to)] TJ ET EMC /P <</MCID 1064 >> BDC BT 1 0 0 -1 230.31799316 26.98600006 Tm [( )] TJ ET EMC /P <</MCID 1065 >> BDC BT 1 0 0 -1 0 42.58599854 Tm [(be)] TJ ET EMC /P <</MCID 1066 >> BDC BT 1 0 0 -1 9.43799973 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1067 >> BDC BT 1 0 0 -1 12.25899982 42.58599854 Tm [(recla)1(imed)] TJ ET EMC /P <</MCID 1068 >> BDC BT 1 0 0 -1 51.6780014 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1069 >> BDC BT 1 0 0 -1 54.49900055 42.58599854 Tm [(every)] TJ ET EMC /P <</MCID 1070 >> BDC BT 1 0 0 -1 76.70600128 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1071 >> BDC BT 1 0 0 -1 79.52700043 42.58599854 Tm [(tim)1(e)] TJ ET EMC /P <</MCID 1072 >> BDC BT 1 0 0 -1 97.30000305 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1073 >> BDC BT 1 0 0 -1 100.1210022 42.58599854 Tm [(and)] TJ ET EMC /P <</MCID 1074 >> BDC BT 1 0 0 -1 114.55899811 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1075 >> BDC BT 1 0 0 -1 117.37999725 42.58599854 Tm [(reused)] TJ ET EMC /P <</MCID 1076 >> BDC BT 1 0 0 -1 143.47900391 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1077 >> BDC BT 1 0 0 -1 146.30000305 42.58599854 Tm [(within)] TJ ET EMC /P <</MCID 1078 >> BDC BT 1 0 0 -1 171.85699463 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1079 >> BDC BT 1 0 0 -1 174.67799377 42.58599854 Tm [(up)] TJ ET EMC /P <</MCID 1080 >> BDC BT 1 0 0 -1 184.67799377 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1081 >> BDC BT 1 0 0 -1 187.49899292 42.58599854 Tm [(to)] TJ ET EMC /P <</MCID 1082 >> BDC BT 1 0 0 -1 195.2769928 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1083 >> BDC BT 1 0 0 -1 198.0980072 42.58599854 Tm [(72hours)] TJ ET EMC /P <</MCID 1084 >> BDC BT 1 0 0 -1 230.32000732 42.58599854 Tm [( )] TJ ET EMC /P <</MCID 1085 >> BDC BT 1 0 0 -1 0 58.18599701 Tm [(of)] TJ ET EMC /P <</MCID 1086 >> BDC BT 1 0 0 -1 8.32999992 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1087 >> BDC BT 1 0 0 -1 12.19799995 58.18599701 Tm [(their)] TJ ET EMC /P <</MCID 1088 >> BDC BT 1 0 0 -1 30.52300072 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1089 >> BDC BT 1 0 0 -1 34.39099884 58.18599701 Tm [(lifet)1(ime.)] TJ ET EMC /P <</MCID 1090 >> BDC BT 1 0 0 -1 67.98999786 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1091 >> BDC BT 1 0 0 -1 71.85800171 58.18599701 Tm [(To)] TJ ET EMC /P <</MCID 1092 >> BDC BT 1 0 0 -1 82.96600342 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1093 >> BDC BT 1 0 0 -1 86.83399963 58.18599701 Tm [(control)] TJ ET EMC /P <</MCID 1094 >> BDC BT 1 0 0 -1 115.15899658 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1095 >> BDC BT 1 0 0 -1 119.02700043 58.18599701 Tm [(lifet)1(ime)] TJ ET EMC /P <</MCID 1096 >> BDC BT 1 0 0 -1 150.12600708 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1097 >> BDC BT 1 0 0 -1 153.9940033 58.18599701 Tm [(of)] TJ ET EMC /P <</MCID 1098 >> BDC BT 1 0 0 -1 162.32400513 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1099 >> BDC BT 1 0 0 -1 166.19200134 58.18599701 Tm [(both)] TJ ET EMC /P <</MCID 1100 >> BDC BT 1 0 0 -1 183.97000122 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1101 >> BDC BT 1 0 0 -1 187.83799744 58.18599701 Tm [(chemi)1(cals,)] TJ ET EMC /P <</MCID 1102 >> BDC BT 1 0 0 -1 230.31799316 58.18599701 Tm [( )] TJ ET EMC /P <</MCID 1103 >> BDC BT 1 0 0 -1 0 73.78600311 Tm [(two)] TJ ET EMC /P <</MCID 1104 >> BDC BT 1 0 0 -1 15 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1105 >> BDC BT 1 0 0 -1 19.11199951 73.78600311 Tm [(standards)] TJ ET EMC /P <</MCID 1106 >> BDC BT 1 0 0 -1 56.88100052 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1107 >> BDC BT 1 0 0 -1 60.99300003 73.78600311 Tm [(are)] TJ ET EMC /P <</MCID 1108 >> BDC BT 1 0 0 -1 73.19999695 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1109 >> BDC BT 1 0 0 -1 77.31199646 73.78600311 Tm [(proposed)] TJ ET EMC /P <</MCID 1110 >> BDC BT 1 0 0 -1 113.97200012 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1111 >> BDC BT 1 0 0 -1 118.08399963 73.78600311 Tm [(for)] TJ ET EMC /P <</MCID 1112 >> BDC BT 1 0 0 -1 129.7440033 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1113 >> BDC BT 1 0 0 -1 133.85600281 73.78600311 Tm [(the)] TJ ET EMC /P <</MCID 1114 >> BDC BT 1 0 0 -1 146.07299805 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1115 >> BDC BT 1 0 0 -1 150.18499756 73.78600311 Tm [(machi)1(ne)] TJ ET EMC /P <</MCID 1116 >> BDC BT 1 0 0 -1 184.05700684 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1117 >> BDC BT 1 0 0 -1 188.16900635 73.78600311 Tm [(itself.)] TJ ET EMC /P <</MCID 1118 >> BDC BT 1 0 0 -1 210.66400146 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1119 >> BDC BT 1 0 0 -1 214.77600098 73.78600311 Tm [(The)] TJ ET EMC /P <</MCID 1120 >> BDC BT 1 0 0 -1 230.32299805 73.78600311 Tm [( )] TJ ET EMC /P <</MCID 1121 >> BDC BT 1 0 0 -1 0 89.38600159 Tm [(first)] TJ ET EMC /P <</MCID 1122 >> BDC BT 1 0 0 -1 16.1079998 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1123 >> BDC BT 1 0 0 -1 19.97800064 89.38600159 Tm [(is)] TJ ET EMC /P <</MCID 1124 >> BDC BT 1 0 0 -1 26.64800072 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1125 >> BDC BT 1 0 0 -1 30.51799965 89.38600159 Tm [(to)] TJ ET EMC /P <</MCID 1126 >> BDC BT 1 0 0 -1 38.29600143 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1127 >> BDC BT 1 0 0 -1 42.16600037 89.38600159 Tm [(strictl)1(y)] TJ ET EMC /P <</MCID 1128 >> BDC BT 1 0 0 -1 69.93900299 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1129 >> BDC BT 1 0 0 -1 73.80899811 89.38600159 Tm [(control)] TJ ET EMC /P <</MCID 1130 >> BDC BT 1 0 0 -1 102.13400269 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1131 >> BDC BT 1 0 0 -1 106.0039978 89.38600159 Tm [(the)] TJ ET EMC /P <</MCID 1132 >> BDC BT 1 0 0 -1 118.22100067 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1133 >> BDC BT 1 0 0 -1 122.09100342 89.38600159 Tm [(water)] TJ ET EMC /P <</MCID 1134 >> BDC BT 1 0 0 -1 144.29800415 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1135 >> BDC BT 1 0 0 -1 148.16799927 89.38600159 Tm [(concent)1(ration)] TJ ET EMC /P <</MCID 1136 >> BDC BT 1 0 0 -1 202.58700562 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1137 >> BDC BT 1 0 0 -1 206.45700073 89.38600159 Tm [(in)] TJ ET EMC /P <</MCID 1138 >> BDC BT 1 0 0 -1 214.23500061 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1139 >> BDC BT 1 0 0 -1 218.10499573 89.38600159 Tm [(the)] TJ ET EMC /P <</MCID 1140 >> BDC BT 1 0 0 -1 230.32200623 89.38600159 Tm [( )] TJ ET EMC /P <</MCID 1141 >> BDC BT 1 0 0 -1 0 104.98600006 Tm [(chemi)1(cals.)] TJ ET EMC /P <</MCID 1142 >> BDC BT 1 0 0 -1 42.47999954 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1143 >> BDC BT 1 0 0 -1 46.13800049 104.98600006 Tm [(The)] TJ ET EMC /P <</MCID 1144 >> BDC BT 1 0 0 -1 61.68500137 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1145 >> BDC BT 1 0 0 -1 65.34300232 104.98600006 Tm [(second)] TJ ET EMC /P <</MCID 1146 >> BDC BT 1 0 0 -1 93.11199951 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1147 >> BDC BT 1 0 0 -1 96.76999664 104.98600006 Tm [(is)] TJ ET EMC /P <</MCID 1148 >> BDC BT 1 0 0 -1 103.44000244 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1149 >> BDC BT 1 0 0 -1 107.09799957 104.98600006 Tm [(in)] TJ ET EMC /P <</MCID 1150 >> BDC BT 1 0 0 -1 114.87599945 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1151 >> BDC BT 1 0 0 -1 118.53399658 104.98600006 Tm [(referenc)1(e)] TJ ET EMC /P <</MCID 1152 >> BDC BT 1 0 0 -1 155.71699524 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1153 >> BDC BT 1 0 0 -1 159.375 104.98600006 Tm [(to)] TJ ET EMC /P <</MCID 1154 >> BDC BT 1 0 0 -1 167.15299988 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1155 >> BDC BT 1 0 0 -1 170.81100464 104.98600006 Tm [(a)] TJ ET EMC /P <</MCID 1156 >> BDC BT 1 0 0 -1 175.24899292 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1157 >> BDC BT 1 0 0 -1 178.90699768 104.98600006 Tm [(high)] TJ ET EMC /P <</MCID 1158 >> BDC BT 1 0 0 -1 196.68499756 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1159 >> BDC BT 1 0 0 -1 200.34300232 104.98600006 Tm [(recla)1(im)] TJ ET EMC /P <</MCID 1160 >> BDC BT 1 0 0 -1 230.32299805 104.98600006 Tm [( )] TJ ET EMC /P <</MCID 1161 >> BDC BT 1 0 0 -1 0 120.58599854 Tm [(rate)] TJ ET EMC /P <</MCID 1162 >> BDC BT 1 0 0 -1 14.98499966 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1163 >> BDC BT 1 0 0 -1 19.19099998 120.58599854 Tm [(of)] TJ ET EMC /P <</MCID 1164 >> BDC BT 1 0 0 -1 27.52099991 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1165 >> BDC BT 1 0 0 -1 31.72699928 120.58599854 Tm [(the)] TJ ET EMC /P <</MCID 1166 >> BDC BT 1 0 0 -1 43.94400024 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1167 >> BDC BT 1 0 0 -1 48.15000153 120.58599854 Tm [(chemi)1(cals.)] TJ ET EMC /P <</MCID 1168 >> BDC BT 1 0 0 -1 90.62999725 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1169 >> BDC BT 1 0 0 -1 94.83599854 120.58599854 Tm [(If)] TJ ET EMC /P <</MCID 1170 >> BDC BT 1 0 0 -1 101.4960022 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1171 >> BDC BT 1 0 0 -1 105.70200348 120.58599854 Tm [(the)] TJ ET EMC /P <</MCID 1172 >> BDC BT 1 0 0 -1 117.91899872 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1173 >> BDC BT 1 0 0 -1 122.125 120.58599854 Tm [(water)] TJ ET EMC /P <</MCID 1174 >> BDC BT 1 0 0 -1 144.33200073 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1175 >> BDC BT 1 0 0 -1 148.53799438 120.58599854 Tm [(content)] TJ ET EMC /P <</MCID 1176 >> BDC BT 1 0 0 -1 177.97200012 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1177 >> BDC BT 1 0 0 -1 182.17799377 120.58599854 Tm [(is)] TJ ET EMC /P <</MCID 1178 >> BDC BT 1 0 0 -1 188.8480072 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1179 >> BDC BT 1 0 0 -1 193.05400085 120.58599854 Tm [(too)] TJ ET EMC /P <</MCID 1180 >> BDC BT 1 0 0 -1 205.83200073 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1181 >> BDC BT 1 0 0 -1 210.03799438 120.58599854 Tm [(high,)] TJ ET EMC /P <</MCID 1182 >> BDC BT 1 0 0 -1 230.31599426 120.58599854 Tm [( )] TJ ET EMC /P <</MCID 1183 >> BDC BT 1 0 0 -1 0 136.18600464 Tm [(fluorides)] TJ ET EMC /P <</MCID 1184 >> BDC BT 1 0 0 -1 35.54700089 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1185 >> BDC BT 1 0 0 -1 41.27600098 136.18600464 Tm [(dissociati)1(on)] TJ ET EMC /P <</MCID 1186 >> BDC BT 1 0 0 -1 89.0490036 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1187 >> BDC BT 1 0 0 -1 94.77799988 136.18600464 Tm [(will)] TJ ET EMC /P <</MCID 1188 >> BDC BT 1 0 0 -1 110.33499908 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1189 >> BDC BT 1 0 0 -1 116.06400299 136.18600464 Tm [(be)] TJ ET EMC /P <</MCID 1190 >> BDC BT 1 0 0 -1 125.5019989 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1191 >> BDC BT 1 0 0 -1 131.23100281 136.18600464 Tm [(enhance)1(d,)] TJ ET EMC /P <</MCID 1192 >> BDC BT 1 0 0 -1 171.48500061 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1193 >> BDC BT 1 0 0 -1 177.21400452 136.18600464 Tm [(leadi)1(ng)] TJ ET EMC /P <</MCID 1194 >> BDC BT 1 0 0 -1 206.647995 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1195 >> BDC BT 1 0 0 -1 212.3769989 136.18600464 Tm [(to)] TJ ET EMC /P <</MCID 1196 >> BDC BT 1 0 0 -1 220.15499878 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1197 >> BDC BT 1 0 0 -1 225.88400269 136.18600464 Tm [(a)] TJ ET EMC /P <</MCID 1198 >> BDC BT 1 0 0 -1 230.32200623 136.18600464 Tm [( )] TJ ET EMC /P <</MCID 1199 >> BDC BT 1 0 0 -1 0 151.78599548 Tm [(sharp)] TJ ET EMC /P <</MCID 1200 >> BDC BT 1 0 0 -1 21.65999985 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1201 >> BDC BT 1 0 0 -1 24.63800049 151.78599548 Tm [(increa)1(s)-1(e)] TJ ET EMC /P <</MCID 1202 >> BDC BT 1 0 0 -1 57.39199829 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1203 >> BDC BT 1 0 0 -1 60.36999893 151.78599548 Tm [(in)] TJ ET EMC /P <</MCID 1204 >> BDC BT 1 0 0 -1 68.14800262 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1205 >> BDC BT 1 0 0 -1 71.12599945 151.78599548 Tm [(the)] TJ ET EMC /P <</MCID 1206 >> BDC BT 1 0 0 -1 83.34300232 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1207 >> BDC BT 1 0 0 -1 86.32099915 151.78599548 Tm [(etchi)1(ng)] TJ ET EMC /P <</MCID 1208 >> BDC BT 1 0 0 -1 115.75499725 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1209 >> BDC BT 1 0 0 -1 118.73300171 151.78599548 Tm [(rate)] TJ ET EMC /P <</MCID 1210 >> BDC BT 1 0 0 -1 133.71800232 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1211 >> BDC BT 1 0 0 -1 136.69599915 151.78599548 Tm [(of)] TJ ET EMC /P <</MCID 1212 >> BDC BT 1 0 0 -1 145.02600098 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1213 >> BDC BT 1 0 0 -1 148.0039978 151.78599548 Tm [(copper)] TJ ET EMC /P <</MCID 1214 >> BDC BT 1 0 0 -1 175.21099854 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1215 >> BDC BT 1 0 0 -1 178.18899536 151.78599548 Tm [(meta)1(l,)] TJ ET EMC /P <</MCID 1216 >> BDC BT 1 0 0 -1 202.90100098 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1217 >> BDC BT 1 0 0 -1 205.8789978 151.78599548 Tm [(which)] TJ ET EMC /P <</MCID 1218 >> BDC BT 1 0 0 -1 230.31700134 151.78599548 Tm [( )] TJ ET EMC /P <</MCID 1219 >> BDC BT 1 0 0 -1 0 167.38600159 Tm [(will)] TJ ET EMC /P <</MCID 1220 >> BDC BT 1 0 0 -1 15.55700016 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1221 >> BDC BT 1 0 0 -1 20.12400055 167.38600159 Tm [(cause)] TJ ET EMC /P <</MCID 1222 >> BDC BT 1 0 0 -1 42.33100128 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1223 >> BDC BT 1 0 0 -1 46.89799881 167.38600159 Tm [(the)] TJ ET EMC /P <</MCID 1224 >> BDC BT 1 0 0 -1 59.11500168 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1225 >> BDC BT 1 0 0 -1 63.68199921 167.38600159 Tm [(excessive)] TJ ET EMC /P <</MCID 1226 >> BDC BT 1 0 0 -1 101.99700165 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1227 >> BDC BT 1 0 0 -1 106.56400299 167.38600159 Tm [(loss)] TJ ET EMC /P <</MCID 1228 >> BDC BT 1 0 0 -1 122.12599945 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1229 >> BDC BT 1 0 0 -1 126.69300079 167.38600159 Tm [(of)] TJ ET EMC /P <</MCID 1230 >> BDC BT 1 0 0 -1 135.022995 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1231 >> BDC BT 1 0 0 -1 139.58999634 167.38600159 Tm [(copper.)] TJ ET EMC /P <</MCID 1232 >> BDC BT 1 0 0 -1 169.29699707 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1233 >> BDC BT 1 0 0 -1 173.86399841 167.38600159 Tm [(If)] TJ ET EMC /P <</MCID 1234 >> BDC BT 1 0 0 -1 180.52400208 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1235 >> BDC BT 1 0 0 -1 185.09100342 167.38600159 Tm [(there)] TJ ET EMC /P <</MCID 1236 >> BDC BT 1 0 0 -1 205.07600403 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1237 >> BDC BT 1 0 0 -1 209.64300537 167.38600159 Tm [(is)] TJ ET EMC /P <</MCID 1238 >> BDC BT 1 0 0 -1 216.31300354 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1239 >> BDC BT 1 0 0 -1 220.88000488 167.38600159 Tm [(an)] TJ ET EMC /P <</MCID 1240 >> BDC BT 1 0 0 -1 230.31799316 167.38600159 Tm [( )] TJ ET EMC /P <</MCID 1241 >> BDC BT 1 0 0 -1 0 182.98600769 Tm [(excessive)] TJ ET EMC /P <</MCID 1242 >> BDC BT 1 0 0 -1 38.31499863 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1243 >> BDC BT 1 0 0 -1 41.2840004 182.98600769 Tm [(loss)] TJ ET EMC /P <</MCID 1244 >> BDC BT 1 0 0 -1 56.84600067 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1245 >> BDC BT 1 0 0 -1 59.81499863 182.98600769 Tm [(of)] TJ ET EMC /P <</MCID 1246 >> BDC BT 1 0 0 -1 68.14499664 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1247 >> BDC BT 1 0 0 -1 71.11399841 182.98600769 Tm [(water,)] TJ ET EMC /P <</MCID 1248 >> BDC BT 1 0 0 -1 95.82099915 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1249 >> BDC BT 1 0 0 -1 98.79000092 182.98600769 Tm [(react)1(ive)] TJ ET EMC /P <</MCID 1250 >> BDC BT 1 0 0 -1 130.43099976 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1251 >> BDC BT 1 0 0 -1 133.3999939 182.98600769 Tm [(species)] TJ ET EMC /P <</MCID 1252 >> BDC BT 1 0 0 -1 162.2769928 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1253 >> BDC BT 1 0 0 -1 165.2460022 182.98600769 Tm [(will)] TJ ET EMC /P <</MCID 1254 >> BDC BT 1 0 0 -1 180.80299377 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1255 >> BDC BT 1 0 0 -1 183.77200317 182.98600769 Tm [(be)] TJ ET EMC /P <</MCID 1256 >> BDC BT 1 0 0 -1 193.21000671 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1257 >> BDC BT 1 0 0 -1 196.17900085 182.98600769 Tm [(reduced,)] TJ ET EMC /P <</MCID 1258 >> BDC BT 1 0 0 -1 230.32499695 182.98600769 Tm [( )] TJ ET EMC /P <</MCID 1259 >> BDC BT 1 0 0 -1 0 198.58599854 Tm [(which)] TJ ET EMC /P <</MCID 1260 >> BDC BT 1 0 0 -1 24.43799973 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1261 >> BDC BT 1 0 0 -1 27.44599915 198.58599854 Tm [(will)] TJ ET EMC /P <</MCID 1262 >> BDC BT 1 0 0 -1 43.00299835 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1263 >> BDC BT 1 0 0 -1 46.01100159 198.58599854 Tm [(have)] TJ ET EMC /P <</MCID 1264 >> BDC BT 1 0 0 -1 64.88800049 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1265 >> BDC BT 1 0 0 -1 67.89600372 198.58599854 Tm [(a)] TJ ET EMC /P <</MCID 1266 >> BDC BT 1 0 0 -1 72.33399963 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1267 >> BDC BT 1 0 0 -1 75.34200287 198.58599854 Tm [(direct)] TJ ET EMC /P <</MCID 1268 >> BDC BT 1 0 0 -1 98.10600281 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1269 >> BDC BT 1 0 0 -1 101.11399841 198.58599854 Tm [(negati)1(ve)] TJ ET EMC /P <</MCID 1270 >> BDC BT 1 0 0 -1 134.98599243 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1271 >> BDC BT 1 0 0 -1 137.9940033 198.58599854 Tm [(impac)1(t)] TJ ET EMC /P <</MCID 1272 >> BDC BT 1 0 0 -1 165.20599365 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1273 >> BDC BT 1 0 0 -1 168.21400452 198.58599854 Tm [(on)] TJ ET EMC /P <</MCID 1274 >> BDC BT 1 0 0 -1 178.21400452 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1275 >> BDC BT 1 0 0 -1 181.22200012 198.58599854 Tm [(the)] TJ ET EMC /P <</MCID 1276 >> BDC BT 1 0 0 -1 193.43899536 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1277 >> BDC BT 1 0 0 -1 196.44700623 198.58599854 Tm [(clea)1(ning)] TJ ET EMC /P <</MCID 1278 >> BDC BT 1 0 0 -1 230.31900024 198.58599854 Tm [( )] TJ ET EMC /P <</MCID 1279 >> BDC BT 1 0 0 -1 0 214.18600464 Tm [(effect)1(s)] TJ ET EMC /P <</MCID 1280 >> BDC BT 1 0 0 -1 26.64599991 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1281 >> BDC BT 1 0 0 -1 34.44499969 214.18600464 Tm [(and)] TJ ET EMC /P <</MCID 1282 >> BDC BT 1 0 0 -1 48.88299942 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1283 >> BDC BT 1 0 0 -1 56.68199921 214.18600464 Tm [(ma)] TJ ET EMC /P <</MCID 1284 >> BDC BT 1 0 0 -1 68.89900208 214.18600464 Tm [(ke)] TJ ET EMC /P <</MCID 1285 >> BDC BT 1 0 0 -1 78.33699799 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1286 >> BDC BT 1 0 0 -1 86.13600159 214.18600464 Tm [(the)] TJ ET EMC /P <</MCID 1287 >> BDC BT 1 0 0 -1 98.35299683 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1288 >> BDC BT 1 0 0 -1 106.15200043 214.18600464 Tm [(residue)] TJ ET EMC /P <</MCID 1289 >> BDC BT 1 0 0 -1 135.02900696 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1290 >> BDC BT 1 0 0 -1 142.82800293 214.18600464 Tm [(removal)] TJ ET EMC /P <</MCID 1291 >> BDC BT 1 0 0 -1 175.59199524 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1292 >> BDC BT 1 0 0 -1 183.39100647 214.18600464 Tm [(incompl)1(ete.)] TJ ET EMC /P <</MCID 1293 >> BDC BT 1 0 0 -1 230.32000732 214.18600464 Tm [( )] TJ ET EMC /P <</MCID 1294 >> BDC BT 1 0 0 -1 0 229.78599548 Tm [(Neverthel)1(ess)-1(,)] TJ ET EMC /P <</MCID 1295 >> BDC BT 1 0 0 -1 54.14599991 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1296 >> BDC BT 1 0 0 -1 59.08000183 229.78599548 Tm [(the)] TJ ET EMC /P <</MCID 1297 >> BDC BT 1 0 0 -1 71.29699707 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1298 >> BDC BT 1 0 0 -1 76.23100281 229.78599548 Tm [(etchi)1(ng)] TJ ET EMC /P <</MCID 1299 >> BDC BT 1 0 0 -1 105.66500092 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1300 >> BDC BT 1 0 0 -1 110.59899902 229.78599548 Tm [(rate)] TJ ET EMC /P <</MCID 1301 >> BDC BT 1 0 0 -1 125.58399963 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1302 >> BDC BT 1 0 0 -1 130.51800537 229.78599548 Tm [(of)] TJ ET EMC /P <</MCID 1303 >> BDC BT 1 0 0 -1 138.8480072 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1304 >> BDC BT 1 0 0 -1 143.78199768 229.78599548 Tm [(ST250)] TJ ET EMC /P <</MCID 1305 >> BDC BT 1 0 0 -1 170.45199585 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1306 >> BDC BT 1 0 0 -1 175.38600159 229.78599548 Tm [(and)] TJ ET EMC /P <</MCID 1307 >> BDC BT 1 0 0 -1 189.82400513 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1308 >> BDC BT 1 0 0 -1 194.75799561 229.78599548 Tm [(ICS8000)] TJ ET EMC /P <</MCID 1309 >> BDC BT 1 0 0 -1 230.32000732 229.78599548 Tm [( )] TJ ET EMC /P <</MCID 1310 >> BDC BT 1 0 0 -1 0 245.38600159 Tm [(does)] TJ ET EMC /P <</MCID 1311 >> BDC BT 1 0 0 -1 18.32999992 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1312 >> BDC BT 1 0 0 -1 21.00600052 245.38600159 Tm [(not)] TJ ET EMC /P <</MCID 1313 >> BDC BT 1 0 0 -1 33.7840004 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1314 >> BDC BT 1 0 0 -1 36.45999908 245.38600159 Tm [(change)] TJ ET EMC /P <</MCID 1315 >> BDC BT 1 0 0 -1 64.77500153 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1316 >> BDC BT 1 0 0 -1 67.4509964 245.38600159 Tm [(a)] TJ ET EMC /P <</MCID 1317 >> BDC BT 1 0 0 -1 71.88899994 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1318 >> BDC BT 1 0 0 -1 74.56500244 245.38600159 Tm [(lot)] TJ ET EMC /P <</MCID 1319 >> BDC BT 1 0 0 -1 85.12200165 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1320 >> BDC BT 1 0 0 -1 87.79799652 245.38600159 Tm [(within)] TJ ET EMC /P <</MCID 1321 >> BDC BT 1 0 0 -1 113.35500336 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1322 >> BDC BT 1 0 0 -1 116.03099823 245.38600159 Tm [(72hours)] TJ ET EMC /P <</MCID 1323 >> BDC BT 1 0 0 -1 148.25300598 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1324 >> BDC BT 1 0 0 -1 150.92900085 245.38600159 Tm [(of)] TJ ET EMC /P <</MCID 1325 >> BDC BT 1 0 0 -1 159.25900269 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1326 >> BDC BT 1 0 0 -1 161.93499756 245.38600159 Tm [(the)] TJ ET EMC /P <</MCID 1327 >> BDC BT 1 0 0 -1 174.1519928 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1328 >> BDC BT 1 0 0 -1 176.82800293 245.38600159 Tm [(bath)] TJ ET EMC /P <</MCID 1329 >> BDC BT 1 0 0 -1 194.04499817 245.38600159 Tm [( )] TJ ET EMC /P <</MCID 1330 >> BDC BT 1 0 0 -1 196.72099304 245.38600159 Tm [(lifet)1(ime,)] TJ ET EMC /P <</MCID 1331 >> BDC BT 1 0 0 -1 230.32000732 245.38600159 Tm [( )] TJ ET EMC Q Q Q 1 0 0 -1 0 841.90002441 cm 
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